JPS6371659A - 検針ユニツト - Google Patents

検針ユニツト

Info

Publication number
JPS6371659A
JPS6371659A JP61216634A JP21663486A JPS6371659A JP S6371659 A JPS6371659 A JP S6371659A JP 61216634 A JP61216634 A JP 61216634A JP 21663486 A JP21663486 A JP 21663486A JP S6371659 A JPS6371659 A JP S6371659A
Authority
JP
Japan
Prior art keywords
inspecting
stylus
holders
holder
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61216634A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516747B2 (2
Inventor
Shozo Yamashita
山下　正三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP61216634A priority Critical patent/JPS6371659A/ja
Publication of JPS6371659A publication Critical patent/JPS6371659A/ja
Publication of JPH0516747B2 publication Critical patent/JPH0516747B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
JP61216634A 1986-09-12 1986-09-12 検針ユニツト Granted JPS6371659A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61216634A JPS6371659A (ja) 1986-09-12 1986-09-12 検針ユニツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61216634A JPS6371659A (ja) 1986-09-12 1986-09-12 検針ユニツト

Publications (2)

Publication Number Publication Date
JPS6371659A true JPS6371659A (ja) 1988-04-01
JPH0516747B2 JPH0516747B2 (2) 1993-03-05

Family

ID=16691508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61216634A Granted JPS6371659A (ja) 1986-09-12 1986-09-12 検針ユニツト

Country Status (1)

Country Link
JP (1) JPS6371659A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6144212A (en) * 1997-10-21 2000-11-07 Mitsubishi Denki Kabushiki Kaisha Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547816U (2) * 1977-06-18 1979-01-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547816U (2) * 1977-06-18 1979-01-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6144212A (en) * 1997-10-21 2000-11-07 Mitsubishi Denki Kabushiki Kaisha Vertical needle type probe card, method of manufacturing thereof, method of replacing defective probe needle and test method of wafer using the probe card

Also Published As

Publication number Publication date
JPH0516747B2 (2) 1993-03-05

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