JPS6373359U - - Google Patents
Info
- Publication number
- JPS6373359U JPS6373359U JP16786386U JP16786386U JPS6373359U JP S6373359 U JPS6373359 U JP S6373359U JP 16786386 U JP16786386 U JP 16786386U JP 16786386 U JP16786386 U JP 16786386U JP S6373359 U JPS6373359 U JP S6373359U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- target
- substrate
- insulating layer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本考案に係る基板押えを適用したスパ
ツタ装置の概略構成図、第２図は基板を基板ホル
ダーに取付けた状態の斜視図である。
尚、図面中１はチヤンバー、６は高周波電源、
７はバツキングプレート、１０はターゲツト、１
２は基板ホルダー、１３は基板、１４は基板受け
、１５は基板押え、１７は絶縁層である。
FIG. 1 is a schematic configuration diagram of a sputtering apparatus to which a substrate holder according to the present invention is applied, and FIG. 2 is a perspective view of a state in which a substrate is attached to a substrate holder. In addition, in the drawing, 1 is a chamber, 6 is a high frequency power supply,
7 is the bucking plate, 10 is the target, 1
2 is a substrate holder, 13 is a substrate, 14 is a substrate holder, 15 is a substrate holder, and 17 is an insulating layer.
Claims (1)
基板を基板ホルダーに対して保持する基板押えに
おいて、この基板ホルダーは金属材料からなり、
ターゲツトに対向する面には絶縁層が形成されて
いることを特徴とするスパツタ装置における基板
押え。 In a substrate holder that holds a substrate against a substrate holder in a chamber so as to face a target, the substrate holder is made of a metal material,
1. A substrate holder for a sputtering apparatus, characterized in that an insulating layer is formed on a surface facing a target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786386U JPS6373359U (en) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786386U JPS6373359U (en) | 1986-10-31 | 1986-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373359U true JPS6373359U (en) | 1988-05-16 |
Family
ID=31100197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16786386U Pending JPS6373359U (en) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373359U (en) |
-
1986
- 1986-10-31 JP JP16786386U patent/JPS6373359U/ja active Pending
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