JPS6375602A - Three-dimensional measurement of object - Google Patents

Abstract

PURPOSE:To realize a compact apparatus and the three-dimensional measurement of an object, by obtaining multislit beam and reference slit beam by one multislit beam source. CONSTITUTION:A camera orthogonal coordinates system OC-cCyCzC is set in such a state that the optical axis of a camera 1 is set to a Z-axis and, further, a multislit orthogonal coordinates system OM-xMyMzM is set in such a state that a multislit beam source 5 is set to the origin. Then, the surface of an object 4 is irradiated with (m) multislit beam 3 to obtain a plurality of slit beam projection images 9 on said surface while the images 9 are picked up by the camera 1 to obtain (l) slit beam pickup images corresponding to the images 9 on an image surface (c). The multislit beams 3 are controlled to set one of them to reference slit beam 8, and the beam 8 and the beams 3 are allowed to irradiate in a time sharing manner. The pickup image specified by a reference image is allowed to correspond to a slit beam surface S which is, in turn, allowed to correspond to a slit beam surface MK due to the beams 3. By this method, the three-dimensional coordinates due to the camera orthogonal coordinates system of the projection images 9 of the object 4 are calculated to make it possible to perform the three-dimensional measurement of the object 4.

Description

[Detailed description of the invention] [Table of contents] Overview
・・・・・・・・・・・・・・・・・・・・・・・・(3)
Industrial application field・・・・・・・・・・・・・・・・・・
・・・・・・・・・・・・(4) Conventional technology・・・・・・
・・・・・・・・・・・・・・・・・・・・・・・・
...(4) Problems that the invention attempts to solve...
...(5) Means to solve the problem...
・・・・・・・・・(6) Effect・・・・・・・・・・・・
・・・・・・・・・・・・・・・・・・・・・・・・
・・・・・・・・・(7) Basic principle of the invention・・・・・・
・・・・・・・・・・・・・・・・・・・・・(8) Example (i) Configuration of measuring device ・・・・・・・・・・・・・・・
......(15)(ii) Measurement processing...
・・・・・・・・・・・・・・・・・・・・・・・・(1
7) (iii) Other examples...
...... Old... (27) Effects of the invention...
・・・・・・・・・・・・・・・・・・・・・・・・
・・・・・・・・・(30) [Summary] In order to measure the spatial arrangement of objects using so-called binocular stereopsis, a complex process is performed to match the images obtained by two cameras. I need. The present invention controls multi-slit light generated from one multi-slit light source, uses one of the slit lights as a reference slit light, and irradiates an object with the multi-slit light and this reference slit light to create a space inside the object. To provide a three-dimensional measuring method of an object, which can measure the physical arrangement of objects in a short time with one camera.

[Industrial application field]

The present invention relates to a method of measuring the spatial arrangement of an object, which is necessary for controlling industrial robots, etc., and more specifically, the present invention relates to a method of measuring the spatial arrangement of an object, which is necessary for controlling industrial robots, etc. Specifically, the invention measures the spatial arrangement of an object by irradiating the object with multi-slit light and obtaining an image of the object. Concerning methods for three-dimensional measurement of objects.

[Conventional technology]

BACKGROUND ART Conventionally, there has been a so-called binocular stereoscopic method as a method for measuring objects three-dimensionally. In this method, as shown in FIG. 11, two cameras 1 and 2 and a multi-slit light source 5 are fixedly arranged near a target object 4, and the multi-slit light source 5 is turned on to generate a multi-slit light beam. the object 4
irradiate the surface of Next, the slit light projection image 9 by the multi-slit light 3 on the surface of the object 4 is captured by two cameras 1.
Shoot at °2. Corresponding points from a plurality of slit light photographed images corresponding to the slit light projection images 9 taken by the two cameras 1 and 2 (in FIG. This is a method of determining point B) and measuring an object three-dimensionally based on the principle of triangulation. Incidentally, an image taken by the camera 1.2 is shown in FIG.

[Problem that the invention seeks to solve]

By the way, in this conventional method, it is difficult to make correspondences between the plurality of slit light images taken by camera 1 and the plurality of slit light images taken by camera 2 (the process of finding the corresponding point B). However, it has the disadvantage that it is complicated and takes a long processing time. Therefore, the applicant of the present invention has proposed that, without performing the complicated processing of associating images taken with slit light taken by two cameras in the so-called binocular stereoscopic viewing method,
In order to perform three-dimensional measurement of an object, two light sources, a reference slit light source and a multi-slit light source, are used. Place it so that
We proposed a method for three-dimensional measurement of an object by time-divisionally irradiating the object with multi-slit light and reference slit light (Special Training No. 107675, 1985). The present invention further improves this. That is, it is possible to obtain multi-slit light and reference slit light with one light source, and to realize three-dimensional measurement of an object with a compact device.

[Means for solving problems]

The present invention irradiates an object surface with multi-slit light generated by one multi-slit light source and having a plurality of slit light surfaces whose arrangement in a predetermined coordinate system is set in advance,
The multi-slit light is controlled and one of the slit lights is used as a reference slit light to irradiate the same object surface, and a plurality of slit light photographed images corresponding to the slit light projected images by the multi-slit light on the object surface are obtained. A reference slit light image corresponding to the slit light image taken by the reference slit light on the surface of the same object is obtained on a predetermined image plane, and a slit light image corresponding to the reference slit light image is obtained from the plurality of slit light projection images. Assuming that there is no interchange between the multiple slit light photographed images, each slit light photographed image and the multiple slit light photographed image are The space of the object in the above coordinate system is associated with each slit light surface of the slit light, and based on the relative positional relationship of each slit light photographed image and the slit light surface associated with each slit light photographed image. This is a three-dimensional measurement method for objects that measures the physical arrangement of objects.

[For production]

According to the present invention, multi-slit light and reference slit light can be obtained by one multi-slit light source. Therefore,
The number of components such as the LD (laser diode), LD lighting circuit, lens, and diffraction grating that constitute the light source can be reduced, and two-dimensional measurement of objects can be realized with a compact device. Furthermore, it is not necessary to set the positional relationship between the two light sources, and the associated man-hours for adjusting the arrangement of the light sources, calibrating, etc. can be saved.

[Basic principle of the invention]

Next, the basic principle of the present invention will be explained based on FIGS. 1 and 2. The predetermined coordinate system is a camera orthogonal coordinate system 0 with the focal point of the camera 1 as the origin and the optical axis direction of the camera 1 as the two axes.
Set C-xCycz'. Furthermore, the multi-slit orthogonal coordinate system 0' − with the multi-slit light source 5 as the origin
Set x'y'z'. The relationship between the camera orthogonal coordinate system and the multi-slit orthogonal coordinate system is generally expressed by the following relational expression.

However, hB (i, j = 1.2.3) represents the direction cosine of the angle formed between the i and j coordinate axes, and h14 (i = 1, 2
, 3) represents the translation distance.

Now, each slit optical surface M of the multi-slit light 3 points to the plane xH=0 expressed in the multi-slit orthogonal coordinate system.
It is assumed that it is obtained by rotating a predetermined angle around the axis of rotation. Plane x M = Q with the y′″ axis as the rotation axis
θi, and the slit optical surface rotated by J=1~m is M
j, M is expressed as x'cos θ; -z'sin θ, =O. (2). Expressing this in the camera orthogonal coordinate system, using equation (1), M; : (h, xc-I-fizzyc+ 1+132
c+h+n)cosθJ(h3+X'+hzzy
c+ h33z+ hi4sinθ; =O(j=1~
m) −(3).

Let Mo be the slit light surface S of the reference slit light 8, and θ,
is θ, = θ. ...(4). At this time, the slit light surface S of the reference slit light 8
is expressed as x''cosθ, -z'sinθ, -〇...(5).If this is expressed in the camera orthogonal coordinate system, (1
) using the formula S: (hIIx' + h+zyc+ h13Z
C+t+, 4) cosθs (h:++Xc+hz
zyc+h3yZc+hxa)sinθ1-0...
・(6) becomes. Now, by irradiating m multi-slit light beams 3, a plurality of slit light projection images 9 are created on the surface of the object 4,
By photographing it with the camera 1, a 4 image corresponding to the slit light projection image 9 is displayed on the image plane C of the photographing element of the camera 1.
Suppose that slit light images are obtained. Here, the object 4 is assumed to be linear for convenience of explanation, and the coordinates of the slit light projection image 9 on the object 4 are Pw (xCpk CI+ll+
z'pk), (k=1, y~l), and the coordinates of the thrift light photographed image corresponding to each slit light projection image 9 are respectively Ik (xcIk+ycI
Il+zC+k), (k=1~j?). Here, for simplicity, the image plane C is assumed to be a plane parallel to the xcyc plane zc=f (constant, focal length).

At that time, if the line of sight 10 is a straight line Lk ("Ogo■)",
Lk is expressed as. One of the point-like slit light projection images 9 P,
The three-dimensional coordinates of are determined as the intersection of the straight line L3, which is the line of sight 10, and the slit optical surface MJ corresponding to Pk.

However, at this point, each slit light photographed image Ik
(k=1~l) and the slit light surface M by the multi-slit light 3, that is, Il~Il is the object 4
Which slit light surface M, -M is irradiated on the surface?
, it is unclear whether it can be associated with . Therefore, in the present invention, the multi-slit light 3 is controlled, one of the slit lights is used as the reference slit light 8, and the reference slit light 8 and the multi-slit light 3 are irradiated in a time-sharing manner. Here, the coordinates of the slit light projection image 9 on the object 4 by the reference slit light 8 are Ps (Xcps+Ycps, Zc, ,) and t,
, the coordinates of the reference slit light photographed image corresponding to the slit light projection image 9 are Is (Xcl$+yeII+zC
+s)+zCII=f. At that time, I looked at you, (=O
c1. ) is represented by . P, which is a dotted slit light projection image 9, is found as the intersection of the straight line and the slit light surface S corresponding to P3. In other words, equation (8) is obtained, which can be expressed as (
6) Substituting into the equation and summarizing zC, ``” h,, cosθs h3a Sinθs,
9. From (10), ZC-(hz cosθs h:+a sinθ
, ”) /g...(11a) Substituting this into equation (9), xC=(h+4 cosθs h3a sinθs
) Xel5/fg...(11b) yc=(ho4cosθs hxa sinθ5)
yIsC/fg...(11C) is obtained.

Here, ...(12). Equations (11a) to (11c) (hereinafter simply referred to as equation (11)) and equation (12) express P8 using the camera orthogonal coordinate system. By the way, the slit light surface S by the reference slit light 8 is the same as the multi-slit light 3.
Since it coincides with M6, one of the slit light surfaces M, the slit light photographed image I by the multi-slit light 3,
(k = 1 to p), the reference slit light photographed image 1. You should be able to find something equivalent. In this way, the slit light photographed image specified by I8 is 1. , then
I.

is associated with the slit light surface S by the reference slit light 8, and therefore the slit light surface Mk by the multi-slit light 3
It will be associated with After that, based on the arrangement of the multi-slit light beam 3 and the arrangement of the slit light photographed images, assuming that there is no interchange between the two, ■1-1 is Ma-+ + Ir-z
is sequentially associated with MG-, . From this correspondence relationship, in equations (11) and (12), (XcIs + 'I
Instead of Cl51θ,), in P, (xC□+3”I
I+θc−−−+) wo, Pt teL'! , (Xc
rz, yclz.

(lG-r, z)wo・”Pz Tiha(xcr z
+ycIt +θ. . By substituting 1-1), the three-dimensional coordinates of the slit light projection image 9 of the object 4 according to the camera orthogonal coordinate system can be determined, so the three-dimensional measurement of the object 3 becomes possible.

〔Example〕

Hereinafter, a first embodiment of the present invention will be described based on the drawings.

(i) Configuration of Measuring Apparatus An apparatus for realizing the three-dimensional measuring method for an object according to the first embodiment of the present invention is configured as shown in FIG. In the figure, 1 is a camera, and in this embodiment, a television camera is used. 11 is an analog-to-digital converter; 12
is a normal proof that irradiates the surface of the object 4. 13, 1
4 is Japanese Patent Application No. 60-2847, which is the earlier application of the applicant of the present invention.
It is a multi-slit light source 5 as disclosed in No. 67,
It is appropriately selected and used depending on the arrangement of the object 4. The multi-slit light sources 13 and 14 each generate a plurality of slit lights, and one of the slit lights has a higher brightness than the other slit lights. 15 is an image processor, which includes a grayscale image processing unit 16 for extracting the contour of the object 4, and a grayscale image processing unit 16 for extracting the outline of the object 4;
a ridge point processing unit 17 for extracting a pixel-width line;
A polar point processing unit 18 for extracting local peak points, a binarization processing unit 19 for binarizing a digital signal, and an inter-image A
It consists of an inter-image AND calculation section 20 having an ND calculation function. 21 and 22 are image memories, which are devices for storing images obtained on the image plane C of the camera 1. 23 is a line direction image calculation unit, and based on the arrangement of the object 4,
Calculations are performed to select two light source sets 13 and 14 having different directions. 24
is a calculation unit which identifies the slit light photographed image corresponding to the reference slit light photographed image by the reference slit light 8 from among the slit light photographed images by the multi-slit light 3;
This is to calculate the correspondence between the slit light photographed image and the slit light surface M. 25 is a distance calculation unit, (11)
(12) Calculations of three-dimensional coordinates are performed using the second. 26° and 27 are buffers. Reference numeral 29 denotes a CPU, which is connected to all the devices mentioned above and performs control and calculation of all the devices.

(ii) Measurement processing Assume a linear object as the object to be measured.

First, as shown in FIG. 1, a camera 1 and a multi-slit light source 5 are fixedly placed near a target linear object 4. The multi-slit light source 5 emits the multi-slit light 3 and the reference slit light 8 as described in the basic principle of the invention, and depending on the position of the object 4, the multi-slit light source 1
It was selected from 3 and 14. The process will be explained below according to the flowchart shown in FIG. The object 4 is illuminated by lighting the normal lighting 12 placed near the object 4 (4).
1). However, if the object 4 and the background can be clearly distinguished, it is not necessary to turn on the light. Next, the normal lighting 12
The object 4 illuminated by the camera 1 is photographed by the camera 1, and the outline of the object 4 is captured on an image plane C of a photographing element or the like. After that, the photographed image is converted into a digital signal having gray levels by an analog-to-digital converter 11 (80),
Furthermore, the signal is input to an image processor. The signal input to the image processor 15 is processed by the grayscale image processing section 16.
As shown in the flowchart of FIG. 5, smoothing processing or Laplacian processing 81 or smoothing processing and Laplacian processing 82 is performed. Next, the signal is subjected to ridge point processing 83 in the ridge point processing section 17, and furthermore, the signal is subjected to ridge point processing 83 in the ridge point processing section 17.
Binarization processing 84 is performed by 9. If there is a lot of whisker-like noise on the center line of the object 4, after the binarization process 84, a noise removal process 85 is performed to remove the noise.

Through the processing described above, the center line of the object 4 is extracted as a line with a thickness of 1 pixel width, and the image 30 is stored in the image memory 20.
A storage process 86 is performed (42).

Next, the line direction calculation unit 23 calculates the arrangement direction of the linear object 4 from the obtained data. The method is to first determine the starting point L of the object 4 on the image plane C using the camera orthogonal coordinate system.
s (Xs c+ Ys C) and the end point 1-e (
Xi', y8c). Object handled here 4
If it is a long and thin linear member with a not very complicated shape, then L
, and 17. An angle θ indicating the direction in which the object 4 is arranged is determined from . That is, the direction θ is. As a result, a direction vector Z=(cos θ, sin θ) indicating the arrangement of the object 4 is determined. Next, using this direction vector l, light sources A and B arranged in different directions are selected. In this method, when the slit lights of light sources 13 and 14 do, the inner product β・
The absolute value of S, and the absolute value of the inner product β·S3 are calculated, the magnitudes of both are compared, and the light source with the smaller absolute value of the inner product is selected (43). This is to obtain more slit light projection images 9 for the multi-slit light 3 and improve measurement resolution. However, it is not necessary to select only one of the light sources 13 and 14, and measurement may be performed twice from different directions using both light sources 13 and 14.

Next, the normal illumination 12 is turned off and the selected multi-slit light source 13 or 14 is turned on to irradiate the surface of the object 4 with the multi-slit light 3 (44). Here, the G-th slit in the multi-slit light 3 The light is the reference slit light 8,
The light surface is referred to as the reference Surin I/light surface S. A bright line 7 is drawn across the surface of the object 4 by the multi-slit light 3, and a multi-slit light projection image 9 is formed on the surface of the object 4.

As multi-slit light sources 13 and 14, patent application 1986-
Since the method disclosed in No. 284767 is used, the multi-slit light projection image 9 obtained at this time consists of a reference slit light beam with higher brightness and other slit lights.

A camera 1 photographs a bright line 7 including a slit light projection image.

The photographed line image 37 is converted into a digital signal having gray levels by the analog-to-digital converter 11 shown in FIG. 3 (90), and this signal is further input to the image processor 15. The signal input to the image processor 15 is subjected to smoothing processing or Laplacian processing 91 or smoothing processing and Laplacian processing 92 in the grayscale image processing section 16, as shown in the flowchart of FIG. Next, the signal is subjected to ridge point processing 93 in the ridge point processing section 17, and then binarized processing 95 is performed on the signal in the binarization processing section 19. is extracted and stored in the image memory 22 as an image 31.
(45) The threshold level in the binarization processing unit is set to a level high enough to extract only the high-luminance reference slit light from the multi-slit light. At this time, ridge point processing 93 by the ridge point processing unit 17
Instead, base processing 94 by the base processing unit 18 may be applied. In this case, a point having a local peak rather than the center line of the line image 37 formed by the reference slit light 8 is extracted.

In particular, when the reference slit light photographed image 38 is extracted as one pixel, the integration process shown in FIG. 8 is not necessary, which is efficient.

Subsequently, the image data is simultaneously read from the image memory 21 and the image memory 22, and the inter-image AND operation section 20 performs an AND operation on the image 30 and the image 31 to extract a reference slit light photographed image 38.

Even if the object 4 is linear, the reference slit light photographed image 38 may generally be a collection of a plurality of points. Therefore,
These coordinates are Bi (xc, yc
) J = l''n and stored in the buffer 26 (46). The flow of these processes is shown from 100 to 102 in FIG.

Next, the threshold level is lowered and the multi-slit optical image 39 is extracted (47). This process is similar to the case where the reference slit light photographed image 38 is obtained only with a low threshold level. The processing flow is described in FIG. 4 from 47 to 50, and corresponds to 44 to 46 for the reference slit light 8. That is, a plurality of bright lines 7 are drawn across the surface of the object 4 by the multi-slit light 3, and a plurality of slit light projection images 9 are formed on the surface of the object 4. A plurality of bright lines 7 including a plurality of slit light projection images 9 are photographed by the camera 1, and a plurality of slits corresponding to the plurality of slit light projection images 9 are formed by the multi-slit light 3 on the image plane C of the photographing element of the camera 1. A plurality of line images 37 including the optically photographed image 39 are obtained. The photographed line image 37 is processed in the same manner as in the case of the reference slit light 8, the center line of the line image 37 by the multi-slit light 3 is extracted, and storage processing 96 is performed in the image memory 22 as both images 33 (48). .

Subsequently, the image data is simultaneously read from the image memory 21 and the image memory 22, and the inter-image AND operation section 20 performs an AND operation on the image 30 and the image 33 to extract a plurality of slit light photographed images 39.

Each slit light photographed image 39 is generally a collection of a plurality of points even if the object 4 is linear, and the coordinates of the obtained slit light photographed image 39 are expressed as C4 (in the camera orthogonal coordinate system).
xC, yc), j = 1 ~ and stored in the buffer 27 (49). Note that the other processing performed in the case of the reference slit light 8 corresponds similarly to the case of the multi-slit light 7). Perform the processing to do. After that, the multi-slit light source 5 is turned off (50).

Further, assuming that there is no replacement between the slit light images 39, a slit light image 39 corresponding to the reference slit light image 38 of the reference slit light 8 is selected from among the plurality of slit light images 39 of the multi-slit light 3. Identify. For this purpose, the mapping is performed by the calculation unit 24 as shown in FIG. 8. First, data BJ (x', yc) of the positional coordinates of the reference slit light photographed image 38,
The average B (x, y) of j=1 to n is taken to represent the coordinates of the l-slit light photographed image 38 (61). That is, .

Next, the distance and direction between this reference slit light photographed image 38 and each slit light photographed image 39 by the multi-slit light 3 are determined (62). That is, the distance dJ and the angle η on the image plane C are j=1 to 1, respectively. Next, rearrange C1 (xc, yc) from the smallest d, (7) and set it as DJ (X',, Yc) (63), in DJ (xc, y'), DJ
Class O is one whose distance is smaller than a certain distance iJr (6
5). Next, for cases where the sign of η is positive, the patent application
Classification is performed using the cluster method of No. 235898, and 1°2 is divided from the class closest to B (xc, yc).
．． 3... (6B) Similarly, the same processing is performed for those where the sign of η is negative, and B (Xc) is obtained.

-1, -2, -3, etc. from the class closest to ye). When the ridge point processing 93 is performed, the slit light photographed image 39 may be extracted with a size of several pixels, so the average within the same class is taken and represented (69), and they are expressed as Ep (xc, yc ), p-1 to C.

When the polar point processing 94 is performed and each slit light photographed image 39 is extracted by one pixel, it is not necessary to calculate the average value. E
Sort p ('', yc) from the smallest class (70). At this time, if p = r is class O, then Er (xC, y') corresponds to the reference slit light photographed image 38. Through this processing, the image corresponding to the reference slit light image 38 is identified from the slit light image 39. Therefore, the illumination angle θ9 of the slit light surface S by the reference slit light 8 is the G-th Since it coincides with the slit optical surface MG by the multi-slit light 3, Er (xc, yc) is θ.

It will be associated with Then, assuming that there is no replacement for the other slit light photographed images 39,
Er++ (X', yc) is θ6゜1゜Er*
t (" + yc) is θG-2+ "'E'
(x'.

yC) is θG+l-r, similarly Er-+ (x'
+ y c) is θG-1tEr-! (xc l
'jC) is θG-2+ ``'E+(xc, ye) is θ
G-r+1 are associated with each other (71). still,
In the above, for simplicity, the coordinates on the image plane C are expressed using the camera orthogonal coordinate system, but in general, an image plane coordinate system may be set on the image plane C and the coordinates may be expressed using the coordinates. In that case, process 7 to change the image plane coordinate system to the camera orthogonal coordinate system.
2 is required. In this way, each slit light photographed image 39 is associated with each slit light plane Mj of the multi-slit light 3 based on the relative positional relationship between the specified slit light photographed image 39 and other slit light photographed images 39. Become(
51). The coordinates and angles of the slit light photographed image 39 on each image plane C thus obtained are described in the basic principle of the invention (11
) formula and (12) (XCl3 * Y Cl5 *θ
In addition to substituting into Since the coordinates of the projected image 9 and the distance between the coordinates can be determined (73, 52), the object 4 can be measured in three dimensions.

In this embodiment, the object 4 is assumed to be linear, but the object 4 is not limited to a linear object, but can also be applied to a general three-dimensional object. At this time, the slit light projection image on the object is processed as a linear image (in the embodiment, it was processed as a dot-shaped image).

(iii) Other Examples In the above example, as a multi-slit light source, one slit light out of a plurality of slit lights was made to have a higher brightness than the other slit lights, and this was used as a reference slit light. However, in the second embodiment of the present invention, a shutter is provided in front of the multi-slit light source, and the shutter realizes irradiation of only the reference slit light and irradiation of the entire multi-slit light in a time-sharing manner.

The apparatus according to the second embodiment of the present invention is constructed as shown in FIG. 9, and the measurement process is performed as shown in the flow chart of FIG. The difference in FIG. 9 from the configuration in FIG. 3 is that the multi-slit light sources 13 and 14 are provided with shutters 53 and 54, respectively, to form a light source center.

A multi-slit light source having such a shutter mechanism is disclosed in Japanese Patent Application No. 60-2, which was proposed as an earlier application by the applicant of the present invention.
No. 84768. That is, the shutter 53
, 54 are turned ON, all slit lights other than one slit light (reference slit light) among the multi-slit lights are blocked by the shutter, and only one reference slit light is irradiated onto the object. Also, the shack
When 53 and 54 are turned off, the light is opened and all the slit lights (multi-slit light) are irradiated onto the object. The switches 53 and 54 can be ON/CUFF controlled by a host computer or a manual switch.

In FIG. 10, the difference from the flow diagram in FIG. 4 is that when turning on the multi-slit-node light source 13 or 14 in step 44, the shutter 53 or 54 is turned on, and the reference slit light 8 is obtained and the surface of the object 4 is %'<4% slit light 8 is irradiated on the surface of the object 4, and in step 47, the shutter 53 or 54 is turned off to obtain the multi-slit light 3, and the surface of the object 4 is irradiated with the multi-slit light 3.

Note that in the first and second embodiments described above, the measurement method described above may not be applicable because the correspondence cannot be established unless the object to be measured is irradiated with the reference slit light. In this case, the problem can be solved by using a mechanism that allows the light source itself to be moved. For example, set the light source to
-It is to be mounted on a Y stage, robot, etc.

Further, in the second embodiment, the light source may be fixed and the shutter may be moved to move the position of the reference slit light among the multi-slit lights. Furthermore, the position of the reference slit light may be changed by dividing the shutter itself into a plurality of segments corresponding to each slit light of the multi-slit light and controlling each of the segments 'ff. If such a segment 1- is used, the reference slit light can be coded and irradiated, thereby enabling more advanced three-dimensional measurement.

〔Effect of the invention〕

As explained above, according to the present invention, by controlling the multi-slit light, it is possible to substantially obtain the multi-slit light and the reference slit light with one light source, and the multi-slit light and the reference slit light can be obtained by controlling the multi-slit light. Or the reference slit light can be irradiated onto the object, and the object can be three-dimensionally measured based on the obtained image and the relationship between the respective slit lights. Therefore, in an apparatus that implements the method according to the present invention, it is possible to measure an object with one camera and one multi-slit light source, and the processing thereof is also simple. In addition, since the present invention focuses only on the projected image on the object, it can be measured without depending on the contrast with the background, the unevenness of the background, etc., so it can be widely applied to wiring automation, etc. It is something that can be done.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram of the principle of the present invention, Fig. 2 is a diagram of the basic principle of the present invention, Fig. 3 is an overall configuration diagram of the first embodiment of the invention, and Fig. 4 is an illustration of the basic principle of the present invention.
The figure is a flowchart of the process according to the first embodiment of the present invention, FIG. 5 is a flowchart of object contour extraction process, FIG.
The figure is a flowchart of the reference slit image or slit light photographed image extraction process, FIG. 8 is a flowchart of the calculation process with correspondence, FIG. A flowchart of the processing of the second embodiment, FIG. 11 is a spatial layout diagram related to the conventional three-dimensional measurement method of an object, and FIG. 12 is a camera 1
．． FIG. 2 is a diagram showing a photographed image of No. 2; 1.2...Camera, 3...Multi-slit light, 4...Object, 5
...Multi-slit light source, 9...Slit light projected image, 8...Reference slit light, 38...Reference slit light photographed image, 39...Slit light photographed image.

Claims (1)

[Claims] 1. Irradiating an object surface with multi-slit light generated by one multi-slit light source and having a plurality of slit light surfaces whose arrangement in a predetermined coordinate system is set in advance; is controlled and one of the slit lights is used as a reference slit light to irradiate the same object surface, and a plurality of slit light photographed images corresponding to the slit light projection image by the multi-slit light on the object surface and a plurality of slit light photographed images on the same object surface are generated. obtain a reference slit light photographed image corresponding to the slit light projected image by the reference slit light on a predetermined image plane, identify a slit light photographed image corresponding to the reference slit light photographed image from the plurality of slit light photographed images; Assuming that there is no interchange between the plurality of slit light photographed images, each slit light photographed image and multi-slit light photographed image are and the slit light surface, and measure the spatial arrangement of the object in the coordinate system based on the relative positional relationship of each slit light photographed image and the slit light surface associated with each slit light photographed image. A three-dimensional measurement method for objects. 2. Make one slit light in the multi-slit light higher in brightness than the other slit lights, and create multiple slits corresponding to the slit light projection image by the multi-slit light at a high threshold level in the binarization process. A light photographed image is obtained, and on the other hand, one slit light photographed image is obtained as a reference corresponding to a slit light projected image by a slit light with high brightness at a low threshold level in a binarization level. The method described in Scope 1. 3. The multi-slit light generated by the multi-slit light source can be blocked by a shutter except for one slit light that should serve as a reference, and the one slit light that serves as a reference and the multi-slit light can be blocked by turning ON/OFF the shutter. The method according to claim 1, wherein the method can be separated by division.