JPS6377665A - フレキシブルな研磨部材及びその形成方法 - Google Patents
フレキシブルな研磨部材及びその形成方法Info
- Publication number
- JPS6377665A JPS6377665A JP7457687A JP7457687A JPS6377665A JP S6377665 A JPS6377665 A JP S6377665A JP 7457687 A JP7457687 A JP 7457687A JP 7457687 A JP7457687 A JP 7457687A JP S6377665 A JPS6377665 A JP S6377665A
- Authority
- JP
- Japan
- Prior art keywords
- flexible
- mesh
- metal
- polishing member
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims description 30
- 238000000034 method Methods 0.000 title claims description 29
- 239000000463 material Substances 0.000 claims description 56
- 229910052751 metal Inorganic materials 0.000 claims description 52
- 239000002184 metal Substances 0.000 claims description 52
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 22
- 238000009713 electroplating Methods 0.000 claims description 13
- 239000002952 polymeric resin Substances 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 7
- 239000004744 fabric Substances 0.000 claims description 7
- 229920003002 synthetic resin Polymers 0.000 claims description 7
- 239000003082 abrasive agent Substances 0.000 claims description 5
- 229920005570 flexible polymer Polymers 0.000 claims description 5
- 229920001225 polyester resin Polymers 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 239000011888 foil Substances 0.000 claims description 4
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 4
- 239000004800 polyvinyl chloride Substances 0.000 claims description 4
- 239000011140 metalized polyester Substances 0.000 claims description 3
- 229920000728 polyester Polymers 0.000 claims description 3
- -1 poly(phenylene) Polymers 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 229920000265 Polyparaphenylene Polymers 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- MHSKRLJMQQNJNC-UHFFFAOYSA-N terephthalamide Chemical compound NC(=O)C1=CC=C(C(N)=O)C=C1 MHSKRLJMQQNJNC-UHFFFAOYSA-N 0.000 claims 1
- 239000002759 woven fabric Substances 0.000 claims 1
- 239000004033 plastic Substances 0.000 description 7
- 229920003023 plastic Polymers 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 239000002253 acid Substances 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- FPIPGXGPPPQFEQ-OVSJKPMPSA-N all-trans-retinol Chemical compound OC\C=C(/C)\C=C\C=C(/C)\C=C\C1=C(C)CCCC1(C)C FPIPGXGPPPQFEQ-OVSJKPMPSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XRASRVJYOMVDNP-UHFFFAOYSA-N 4-(7-azabicyclo[4.1.0]hepta-1,3,5-triene-7-carbonyl)benzamide Chemical compound C1=CC(C(=O)N)=CC=C1C(=O)N1C2=CC=CC=C21 XRASRVJYOMVDNP-UHFFFAOYSA-N 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 244000241257 Cucumis melo Species 0.000 description 1
- 235000015510 Cucumis melo subsp melo Nutrition 0.000 description 1
- 240000001980 Cucurbita pepo Species 0.000 description 1
- 235000009852 Cucurbita pepo Nutrition 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000011717 all-trans-retinol Substances 0.000 description 1
- 235000019169 all-trans-retinol Nutrition 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA518201 | 1986-09-15 | ||
| CA000518201A CA1280896C (fr) | 1986-09-15 | 1986-09-15 | Article souple a l'abrasif colle, et sa fabrication |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6377665A true JPS6377665A (ja) | 1988-04-07 |
Family
ID=4133937
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7457687A Pending JPS6377665A (ja) | 1986-09-15 | 1987-03-30 | フレキシブルな研磨部材及びその形成方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6377665A (fr) |
| CA (1) | CA1280896C (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63229271A (ja) * | 1987-01-24 | 1988-09-26 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | 研磨剤の製法 |
| US6106382A (en) * | 1996-06-27 | 2000-08-22 | 3M Innovative Properties Company | Abrasive product for dressing |
-
1986
- 1986-09-15 CA CA000518201A patent/CA1280896C/fr not_active Expired - Lifetime
-
1987
- 1987-03-30 JP JP7457687A patent/JPS6377665A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63229271A (ja) * | 1987-01-24 | 1988-09-26 | ミネソタ マイニング アンド マニュファクチャリング カンパニー | 研磨剤の製法 |
| US6106382A (en) * | 1996-06-27 | 2000-08-22 | 3M Innovative Properties Company | Abrasive product for dressing |
Also Published As
| Publication number | Publication date |
|---|---|
| CA1280896C (fr) | 1991-03-05 |
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