JPS6379605U - - Google Patents
Info
- Publication number
- JPS6379605U JPS6379605U JP17367786U JP17367786U JPS6379605U JP S6379605 U JPS6379605 U JP S6379605U JP 17367786 U JP17367786 U JP 17367786U JP 17367786 U JP17367786 U JP 17367786U JP S6379605 U JPS6379605 U JP S6379605U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- magnetic
- magnet
- generating device
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17367786U JPS6379605U (fr) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17367786U JPS6379605U (fr) | 1986-11-12 | 1986-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6379605U true JPS6379605U (fr) | 1988-05-26 |
Family
ID=31111366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17367786U Pending JPS6379605U (fr) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6379605U (fr) |
-
1986
- 1986-11-12 JP JP17367786U patent/JPS6379605U/ja active Pending
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