JPS6384932U - - Google Patents

Info

Publication number
JPS6384932U
JPS6384932U JP1986180724U JP18072486U JPS6384932U JP S6384932 U JPS6384932 U JP S6384932U JP 1986180724 U JP1986180724 U JP 1986180724U JP 18072486 U JP18072486 U JP 18072486U JP S6384932 U JPS6384932 U JP S6384932U
Authority
JP
Japan
Prior art keywords
substrate
recess
quartz plate
semiconductor substrate
claw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986180724U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0635465Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986180724U priority Critical patent/JPH0635465Y2/ja
Publication of JPS6384932U publication Critical patent/JPS6384932U/ja
Application granted granted Critical
Publication of JPH0635465Y2 publication Critical patent/JPH0635465Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986180724U 1986-11-25 1986-11-25 気相成長用基板固定治具 Expired - Lifetime JPH0635465Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986180724U JPH0635465Y2 (ja) 1986-11-25 1986-11-25 気相成長用基板固定治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986180724U JPH0635465Y2 (ja) 1986-11-25 1986-11-25 気相成長用基板固定治具

Publications (2)

Publication Number Publication Date
JPS6384932U true JPS6384932U (cs) 1988-06-03
JPH0635465Y2 JPH0635465Y2 (ja) 1994-09-14

Family

ID=31124940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986180724U Expired - Lifetime JPH0635465Y2 (ja) 1986-11-25 1986-11-25 気相成長用基板固定治具

Country Status (1)

Country Link
JP (1) JPH0635465Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60234314A (ja) * 1984-05-07 1985-11-21 Agency Of Ind Science & Technol ウエハ保持構造

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60234314A (ja) * 1984-05-07 1985-11-21 Agency Of Ind Science & Technol ウエハ保持構造

Also Published As

Publication number Publication date
JPH0635465Y2 (ja) 1994-09-14

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