JPS6389237U - - Google Patents
Info
- Publication number
- JPS6389237U JPS6389237U JP18353486U JP18353486U JPS6389237U JP S6389237 U JPS6389237 U JP S6389237U JP 18353486 U JP18353486 U JP 18353486U JP 18353486 U JP18353486 U JP 18353486U JP S6389237 U JPS6389237 U JP S6389237U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- vacuum valve
- vacuum
- bellows
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18353486U JPS6389237U (cs) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18353486U JPS6389237U (cs) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389237U true JPS6389237U (cs) | 1988-06-10 |
Family
ID=31130361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18353486U Pending JPS6389237U (cs) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389237U (cs) |
-
1986
- 1986-11-28 JP JP18353486U patent/JPS6389237U/ja active Pending
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