JPS6398366U - - Google Patents

Info

Publication number
JPS6398366U
JPS6398366U JP19467386U JP19467386U JPS6398366U JP S6398366 U JPS6398366 U JP S6398366U JP 19467386 U JP19467386 U JP 19467386U JP 19467386 U JP19467386 U JP 19467386U JP S6398366 U JPS6398366 U JP S6398366U
Authority
JP
Japan
Prior art keywords
targets
sputtering
sample
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19467386U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19467386U priority Critical patent/JPS6398366U/ja
Publication of JPS6398366U publication Critical patent/JPS6398366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は一実施例におけるターゲツトと試料の
位置関係を示す概略正面図、第２図は第１図の左
側面図、第３図は３種類のターゲツトを使用した
例を示す概略図、第４図は２種類のターゲツトを
使用した例を示す概略図である。 ２―１〜２―５，１０，１２，１４，２４，２
６……ターゲツト、６―１，６―２……試料。

Claims (1)

    【実用新案登録請求の範囲】
  1. 真空容器内に複数のターゲツトを備え、試料を
    それらのターゲツトに順次対向させてスパツタリ
    ングを行なつていくスパツタリング装置において
    、前記ターゲツトは互いに断面形状の異なるもの
    を含むことを特徴とするスパツタリング装置。
JP19467386U 1986-12-16 1986-12-16 Pending JPS6398366U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19467386U JPS6398366U (ja) 1986-12-16 1986-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19467386U JPS6398366U (ja) 1986-12-16 1986-12-16

Publications (1)

Publication Number Publication Date
JPS6398366U true JPS6398366U (ja) 1988-06-25

Family

ID=31151858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19467386U Pending JPS6398366U (ja) 1986-12-16 1986-12-16

Country Status (1)

Country Link
JP (1) JPS6398366U (ja)

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