JPS6399140U - - Google Patents
Info
- Publication number
- JPS6399140U JPS6399140U JP19212286U JP19212286U JPS6399140U JP S6399140 U JPS6399140 U JP S6399140U JP 19212286 U JP19212286 U JP 19212286U JP 19212286 U JP19212286 U JP 19212286U JP S6399140 U JPS6399140 U JP S6399140U
- Authority
- JP
- Japan
- Prior art keywords
- air
- control system
- amount
- blowing means
- air blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Description
第１図…この考案の第１実施例のクリーンルー
ムの概略断面構成図、第２図…この考案の第２実
施例のクリーンルームの概略断面構成図、第３図
・第４図…従来のクリーンルームを示す断面図。
１……作業室、２……大流量ＨＥＰＡフイルタ
、３……大型送風機、４……生産設備、５……間
仕切、６……機械室、７……小流量ＨＥＰＡフイ
ルター、８……人、９……カーテン、１０……Ｈ
ＥＰＡフイルタ、１１……チヤンバ、１２……小
型送風機、１３……センサ、１４……運搬車、１
５……外部制御信号、１６……中央制御装置、１
７……駆動信号、１８……給気チヤンバ、１９…
…給気ダンパ、２０……床パンチング、２１……
吸気チヤンバ、２２……吸気ダンパ。
Figure 1: Schematic cross-sectional diagram of a clean room according to the first embodiment of this invention, Figure 2: Schematic cross-sectional diagram of a clean room according to the second embodiment of this invention, Figures 3 and 4: Conventional clean room A sectional view shown. 1... Work room, 2... Large flow HEPA filter, 3... Large blower, 4... Production equipment, 5... Partition, 6... Machine room, 7... Small flow HEPA filter, 8... People, 9...Curtain, 10...H
EPA filter, 11...Chamber, 12...Small blower, 13...Sensor, 14...Transport vehicle, 1
5...External control signal, 16...Central control device, 1
7... Drive signal, 18... Air supply chamber, 19...
...Air supply damper, 20...Floor punching, 21...
Intake chamber, 22...Intake damper.
Claims (1)
ような送風手段と制御システムを組み合わせたク
リーンルーム。 (イ) 天井のＨＥＰＡフイルタを区画し、その区
画ごとに送風量を増減できる送風手段。 (ロ) 前記区画を選別して、前記送風手段の送風
量を増減する制御システム。[Scope of claim for utility model registration] A downflow clean room that combines the following ventilation means and control system. (b) Air blowing means that divides the HEPA filter on the ceiling and allows the amount of air to be increased or decreased for each section. (b) A control system that selects the sections and increases or decreases the amount of air blown by the air blowing means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19212286U JPS6399140U (en) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19212286U JPS6399140U (en) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6399140U true JPS6399140U (en) | 1988-06-27 |
Family
ID=31146904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19212286U Pending JPS6399140U (en) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6399140U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008018497A (en) * | 2006-07-13 | 2008-01-31 | Yaskawa Electric Corp | Traveling device and robot |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59157432A (en) * | 1983-02-23 | 1984-09-06 | Hitachi Plant Eng & Constr Co Ltd | Recombinant local environmental control room |
-
1986
- 1986-12-12 JP JP19212286U patent/JPS6399140U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59157432A (en) * | 1983-02-23 | 1984-09-06 | Hitachi Plant Eng & Constr Co Ltd | Recombinant local environmental control room |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008018497A (en) * | 2006-07-13 | 2008-01-31 | Yaskawa Electric Corp | Traveling device and robot |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6399140U (en) | ||
| JPS61195235U (en) | ||
| JPS6184423U (en) | ||
| JPS6432878U (en) | ||
| JPH02120637U (en) | ||
| JPS60173838U (en) | Vertical laminar flow clean room | |
| JPH0361231U (en) | ||
| JPS6176245U (en) | ||
| JPS6222110U (en) | ||
| JPH02144343U (en) | ||
| JPS6141527U (en) | Vertical laminar flow clean room | |
| JPS6445221U (en) | ||
| JPS61104102U (en) | ||
| JPH0332968U (en) | ||
| JPH02109940U (en) | ||
| JPH01169753U (en) | ||
| JPS63198934U (en) | ||
| JPH047216U (en) | ||
| JPS61132072U (en) | ||
| JPS6445222U (en) | ||
| JPS645625U (en) | ||
| JPS6257035U (en) | ||
| JPH0273533U (en) | ||
| JPH048038U (en) | ||
| JPH01163745U (en) |