JPS641089A - Method for reading wafer identification code - Google Patents

Method for reading wafer identification code

Info

Publication number
JPS641089A
JPS641089A JP62156993A JP15699387A JPS641089A JP S641089 A JPS641089 A JP S641089A JP 62156993 A JP62156993 A JP 62156993A JP 15699387 A JP15699387 A JP 15699387A JP S641089 A JPS641089 A JP S641089A
Authority
JP
Japan
Prior art keywords
identification code
wafer
sequence
arrangement
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156993A
Other languages
Japanese (ja)
Other versions
JPH011089A (en
Inventor
Yuichi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62156993A priority Critical patent/JPS641089A/en
Publication of JPH011089A publication Critical patent/JPH011089A/en
Publication of JPS641089A publication Critical patent/JPS641089A/en
Pending legal-status Critical Current

Links

Landscapes

  • Character Discrimination (AREA)

Abstract

PURPOSE: To accurately identify the form of a wafer, by discriminating an identification code based on storage contents in sequence of arrangement of the plural kinds of display forming the identification codes.
CONSTITUTION: An ID code 4 provided in the wafer is read out by a TV camera 5. Those code are formed in sequence of arrangement of the plural kinds of display, and the storage contents AWC in sequence of arrangement of the display are referred in order, respectively, then, a corresponding character is discriminated, and the form of the wafer can be accurately identified.
COPYRIGHT: (C)1989,JPO&Japio
JP62156993A 1987-06-23 1987-06-23 Method for reading wafer identification code Pending JPS641089A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156993A JPS641089A (en) 1987-06-23 1987-06-23 Method for reading wafer identification code

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156993A JPS641089A (en) 1987-06-23 1987-06-23 Method for reading wafer identification code

Publications (2)

Publication Number Publication Date
JPH011089A JPH011089A (en) 1989-01-05
JPS641089A true JPS641089A (en) 1989-01-05

Family

ID=15639831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156993A Pending JPS641089A (en) 1987-06-23 1987-06-23 Method for reading wafer identification code

Country Status (1)

Country Link
JP (1) JPS641089A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8382158B2 (en) 2010-10-29 2013-02-26 Kawasaki Jukogyo Kabushiki Kaisha All terrain vehicle

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074094A (en) * 1983-09-30 1985-04-26 Fujitsu Ltd Character recognizing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6074094A (en) * 1983-09-30 1985-04-26 Fujitsu Ltd Character recognizing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8382158B2 (en) 2010-10-29 2013-02-26 Kawasaki Jukogyo Kabushiki Kaisha All terrain vehicle

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