JPS6411537U - - Google Patents

Info

Publication number
JPS6411537U
JPS6411537U JP1987105895U JP10589587U JPS6411537U JP S6411537 U JPS6411537 U JP S6411537U JP 1987105895 U JP1987105895 U JP 1987105895U JP 10589587 U JP10589587 U JP 10589587U JP S6411537 U JPS6411537 U JP S6411537U
Authority
JP
Japan
Prior art keywords
paste
piping
solenoid valve
pressure air
discharging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987105895U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987105895U priority Critical patent/JPS6411537U/ja
Publication of JPS6411537U publication Critical patent/JPS6411537U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/011—Apparatus therefor
    • H10W72/0113—Apparatus for manufacturing die-attach connectors

Landscapes

  • Coating Apparatus (AREA)
  • Die Bonding (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例で、ペースト排出時
の配管図、第２図は非排出時の配管図である。 １…Ａｇペースト、２…ペースト収納シリンジ
、３Ａ，３Ｂ…配管、４…ソレノイドバルブ、５
…デイスペンサコントローラ、６…高圧エア。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体装置の組立工程に用いられるペースト類
    のデイスペンサにおいて、高圧エア配管とペース
    ト収納筒配管との間に設けたソレノイドバルブが
    、常時閉じられていてペースト類の排出時のみ開
    かれるものであることを特徴とするペーストデイ
    スペンサ。
JP1987105895U 1987-07-09 1987-07-09 Pending JPS6411537U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987105895U JPS6411537U (ja) 1987-07-09 1987-07-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987105895U JPS6411537U (ja) 1987-07-09 1987-07-09

Publications (1)

Publication Number Publication Date
JPS6411537U true JPS6411537U (ja) 1989-01-20

Family

ID=31338916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987105895U Pending JPS6411537U (ja) 1987-07-09 1987-07-09

Country Status (1)

Country Link
JP (1) JPS6411537U (ja)

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