JPS6411541U - - Google Patents
Info
- Publication number
- JPS6411541U JPS6411541U JP1987105036U JP10503687U JPS6411541U JP S6411541 U JPS6411541 U JP S6411541U JP 1987105036 U JP1987105036 U JP 1987105036U JP 10503687 U JP10503687 U JP 10503687U JP S6411541 U JPS6411541 U JP S6411541U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- positioning jig
- protrusions
- conveyed
- stopping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105036U JPS6411541U (sr) | 1987-07-07 | 1987-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987105036U JPS6411541U (sr) | 1987-07-07 | 1987-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6411541U true JPS6411541U (sr) | 1989-01-20 |
Family
ID=31337293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987105036U Pending JPS6411541U (sr) | 1987-07-07 | 1987-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6411541U (sr) |
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1987
- 1987-07-07 JP JP1987105036U patent/JPS6411541U/ja active Pending