JPS6411884B2 - - Google Patents
Info
- Publication number
- JPS6411884B2 JPS6411884B2 JP7355678A JP7355678A JPS6411884B2 JP S6411884 B2 JPS6411884 B2 JP S6411884B2 JP 7355678 A JP7355678 A JP 7355678A JP 7355678 A JP7355678 A JP 7355678A JP S6411884 B2 JPS6411884 B2 JP S6411884B2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- amount
- pointer
- indicating instrument
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 29
- 238000006243 chemical reaction Methods 0.000 claims description 18
- 238000007689 inspection Methods 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Testing Or Calibration Of Command Recording Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7355678A JPS54164157A (en) | 1978-06-16 | 1978-06-16 | Indicator instrument detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7355678A JPS54164157A (en) | 1978-06-16 | 1978-06-16 | Indicator instrument detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54164157A JPS54164157A (en) | 1979-12-27 |
| JPS6411884B2 true JPS6411884B2 (2) | 1989-02-27 |
Family
ID=13521629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7355678A Granted JPS54164157A (en) | 1978-06-16 | 1978-06-16 | Indicator instrument detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54164157A (2) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4868257A (2) * | 1971-12-20 | 1973-09-18 |
-
1978
- 1978-06-16 JP JP7355678A patent/JPS54164157A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54164157A (en) | 1979-12-27 |
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