JPS6412202A - Semiconductor laser length measuring apparatus - Google Patents

Semiconductor laser length measuring apparatus

Info

Publication number
JPS6412202A
JPS6412202A JP62167511A JP16751187A JPS6412202A JP S6412202 A JPS6412202 A JP S6412202A JP 62167511 A JP62167511 A JP 62167511A JP 16751187 A JP16751187 A JP 16751187A JP S6412202 A JPS6412202 A JP S6412202A
Authority
JP
Japan
Prior art keywords
laser diode
semiconductor laser
box body
light source
oscillation wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62167511A
Other languages
Japanese (ja)
Inventor
Hideo Takizawa
Tadashi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP62167511A priority Critical patent/JPS6412202A/en
Publication of JPS6412202A publication Critical patent/JPS6412202A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To achieve stability of oscillation wavelength while compactizing the equipment, by using a semiconductor laser diode as light source while other optical components and optoelectronic components (excluding a cube corner of a moving part) are all housed in one box body. CONSTITUTION:An optical unit 12 has a laser diode 13 of a light source, required optical components and optoelectronic components arranged at specified positions in one box body to be compactized and fixed on a base table 11. A laser beam from the laser diode 13 is divided with beam splitters 17 and 20 into a measuring beam and a reference beam, the measuring beam reflected with a recurring mirror 4 of a moving section 7 is combined with the reference beam by a beam combination prism 21 and a beam with an interference fringe generated with the combination thereof is received with a light receiver 24. An output of the laser diode 13 is detected with a level detector 19 and an oscillation wavelength thereof 13 is controlled constantly through a Peltier element 15 according to an output level.
JP62167511A 1987-07-03 1987-07-03 Semiconductor laser length measuring apparatus Pending JPS6412202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62167511A JPS6412202A (en) 1987-07-03 1987-07-03 Semiconductor laser length measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62167511A JPS6412202A (en) 1987-07-03 1987-07-03 Semiconductor laser length measuring apparatus

Publications (1)

Publication Number Publication Date
JPS6412202A true JPS6412202A (en) 1989-01-17

Family

ID=15851038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62167511A Pending JPS6412202A (en) 1987-07-03 1987-07-03 Semiconductor laser length measuring apparatus

Country Status (1)

Country Link
JP (1) JPS6412202A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56144109A (en) * 1980-04-10 1981-11-10 Meinan Machinery Works Method and apparatus for restarting fixed speed outer circumference drive type veneer lathe
EP0498575A3 (en) * 1991-02-08 1993-02-24 Hughes Aircraft Company Stabilized two color laser diode interferometer
US5428446A (en) * 1993-03-29 1995-06-27 Ziegert; John C. Measurement instrument with interferometer and method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56144109A (en) * 1980-04-10 1981-11-10 Meinan Machinery Works Method and apparatus for restarting fixed speed outer circumference drive type veneer lathe
EP0498575A3 (en) * 1991-02-08 1993-02-24 Hughes Aircraft Company Stabilized two color laser diode interferometer
US5428446A (en) * 1993-03-29 1995-06-27 Ziegert; John C. Measurement instrument with interferometer and method

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