JPS6412366U - - Google Patents
Info
- Publication number
- JPS6412366U JPS6412366U JP10690187U JP10690187U JPS6412366U JP S6412366 U JPS6412366 U JP S6412366U JP 10690187 U JP10690187 U JP 10690187U JP 10690187 U JP10690187 U JP 10690187U JP S6412366 U JPS6412366 U JP S6412366U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- ion source
- plasma generation
- wall
- sheath heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は、この考案の一実施例に係るイオン源
を示す断面図である。第２図は、従来のイオン源
の一例を示す断面図である。
２……イオンビーム、６……プラズマ生成容器
、１６……オーブン収納容器、１８……オーブン
、２０……シースヒータ、２２……イオン源物質
、２６……輻射シールド板。
FIG. 1 is a sectional view showing an ion source according to an embodiment of this invention. FIG. 2 is a sectional view showing an example of a conventional ion source. 2... Ion beam, 6... Plasma generation container, 16... Oven storage container, 18... Oven, 20... Sheath heater, 22... Ion source material, 26... Radiation shield plate.
Claims (1)
その外壁にシースヒータがロー付けされたものを
プラズマ生成容器内に連通させると共に、当該オ
ーブンを同プラズマ生成容器内に連通するオーブ
ン収納容器内に収納した構造のイオン源において
、前記オーブンの外壁に、シースヒータを密閉す
る輻射シールド板を設けたことを特徴とするイオ
ン源。 An oven for heating a solid ion source material with a sheath heater brazed to its outer wall is communicated with a plasma generation container, and the oven is housed in an oven storage container that communicates with the plasma generation container. An ion source according to the present invention, characterized in that a radiation shield plate is provided on the outer wall of the oven to seal the sheath heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10690187U JPS6412366U (en) | 1987-07-10 | 1987-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10690187U JPS6412366U (en) | 1987-07-10 | 1987-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6412366U true JPS6412366U (en) | 1989-01-23 |
Family
ID=31340825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10690187U Pending JPS6412366U (en) | 1987-07-10 | 1987-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6412366U (en) |
-
1987
- 1987-07-10 JP JP10690187U patent/JPS6412366U/ja active Pending