JPS6413132U - - Google Patents

Info

Publication number
JPS6413132U
JPS6413132U JP10795087U JP10795087U JPS6413132U JP S6413132 U JPS6413132 U JP S6413132U JP 10795087 U JP10795087 U JP 10795087U JP 10795087 U JP10795087 U JP 10795087U JP S6413132 U JPS6413132 U JP S6413132U
Authority
JP
Japan
Prior art keywords
suction
pipes
stage
groups
similar loops
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10795087U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10795087U priority Critical patent/JPS6413132U/ja
Publication of JPS6413132U publication Critical patent/JPS6413132U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案の吸着ステージの一実施例を示
す斜視図、第２図、第３図はそれぞれ半導体ウエ
ハの吸着状態を模式的に示した吸着ステージ断面
図、第４図はステージ本体の他の実施例の平面図
を示している。 符号の説明、１……ステージ本体、４……吸引
管、２，３……吸引溝、５，６……並列分岐管、
５ａ，６ａ……開閉弁。

Claims (1)

    【実用新案登録請求の範囲】
  1. ステージ表面に複数の相似形ループ状の吸引溝
    または相似形ループ状に配列される複数の吸引孔
    群を同心的に設け、上記それぞれの吸引溝または
    吸引孔群に、吸引管の並列分岐管を接続すると共
    に、それぞれの分岐管に開閉弁を設けて成る吸着
    ステージ。
JP10795087U 1987-07-13 1987-07-13 Pending JPS6413132U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10795087U JPS6413132U (ja) 1987-07-13 1987-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10795087U JPS6413132U (ja) 1987-07-13 1987-07-13

Publications (1)

Publication Number Publication Date
JPS6413132U true JPS6413132U (ja) 1989-01-24

Family

ID=31342828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10795087U Pending JPS6413132U (ja) 1987-07-13 1987-07-13

Country Status (1)

Country Link
JP (1) JPS6413132U (ja)

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