JPS6416631U - - Google Patents
Info
- Publication number
- JPS6416631U JPS6416631U JP11006187U JP11006187U JPS6416631U JP S6416631 U JPS6416631 U JP S6416631U JP 11006187 U JP11006187 U JP 11006187U JP 11006187 U JP11006187 U JP 11006187U JP S6416631 U JPS6416631 U JP S6416631U
- Authority
- JP
- Japan
- Prior art keywords
- furnace core
- core tube
- hole
- shutter
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 241000406668 Loxodonta cyclotis Species 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000013022 venting Methods 0.000 claims 1
Description
第１図乃至第３図は本考案に係る実施例を示す
もので、第１図は本考案装置の部分断面図、第２
図は本考案装置の底面図、第３図は本考案装置の
側面図、第４図及び第５図は従来例を示すもので
、第４図は従来装置の部分断面図、第５図は従来
装置の側面図である。
１……シヤツター、２……炉芯管、２ａ……注
入口、２ｂ……開口部、３……均熱管、４……ヒ
ータ、５……ボート、６……エレフアント部、８
……孔、９……Ｎ２パージボツクス。
1 to 3 show embodiments of the present invention; FIG. 1 is a partial sectional view of the device of the present invention;
The figure is a bottom view of the device of the present invention, FIG. 3 is a side view of the device of the present invention, FIGS. 4 and 5 are conventional examples, and FIG. 4 is a partial sectional view of the conventional device. FIG. 2 is a side view of a conventional device. 1... Shutter, 2... Furnace core tube, 2a... Inlet, 2b... Opening, 3... Soaking tube, 4... Heater, 5... Boat, 6... Elephant part, 8
...hole, 9... N2 purge box.
Claims (1)
共に、他端部に形成した開口部にシヤツターを装
着した炉芯管と、 該炉芯管の外周面に、順次覆設した熱の均一化
をする均熱管及び熱源としてのヒータと、 前記炉芯管の覆設部以外の前記シヤツター寄り
のエレフアント部に、穿設したガス抜き用孔と、 該孔近傍の前記エレフアント部に、装着し、Ｎ
２ガスを吐出するＮ２パージボツクスとを有する
ことを特徴とする横型酸化拡散装置。[Scope of Claim for Utility Model Registration] A furnace core tube having an inlet for injecting generated gas formed at one end and a shutter attached to an opening formed at the other end, and on the outer peripheral surface of the furnace core tube, A soaking tube for uniformizing heat and a heater as a heat source are sequentially covered, and a gas venting hole is drilled in the elevator part near the shutter other than the covered part of the furnace core tube, and a hole in the vicinity of the hole is provided. Attach it to the elephant part and press N.
1. A horizontal oxidation diffusion device comprising: a N2 purge box for discharging two gases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11006187U JPS6416631U (en) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11006187U JPS6416631U (en) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416631U true JPS6416631U (en) | 1989-01-27 |
Family
ID=31346878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11006187U Pending JPS6416631U (en) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416631U (en) |
-
1987
- 1987-07-20 JP JP11006187U patent/JPS6416631U/ja active Pending
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