JPS6416973A - Testing device for semiconductor device - Google Patents

Abstract

PURPOSE:To generate an optional waveform by one unit by varying an output standard value in synchronization with the waveform of the output signal of a semiconductor device. CONSTITUTION:A control unit 1 controls the whole system to obtain an analog waveform 13 shown by (a) and standard value waveforms 15 and 16 shown by (c) by calculation processing or by digitizing an external waveform, and stores them into an analog pattern generator 31. As for the signal (a) with the waveform 13, a pattern stored in the generator 31 is DA-converted by a DA converter 32 and applied to the semiconductor device 5 through a driving circuit 33. The device 5 processes the input signal (a) with the waveform 13 internally and outputs a signal (b) with a waveform 14. The waveform 14 of the signal (b) is compared by comparators 36 and 37 wit the waveforms 15 and 16 to decide whether or not the waveform is within a standard range 17. This decision result is sent to an error detection unit 38. The unit 38 detects errors decided by the comparators 36 and 37, and the decision result of this unit 38 is sent to the unit 1.