JPS6417366A - Electron beam and x-ray detector - Google Patents

Electron beam and x-ray detector

Info

Publication number
JPS6417366A
JPS6417366A JP62162552A JP16255287A JPS6417366A JP S6417366 A JPS6417366 A JP S6417366A JP 62162552 A JP62162552 A JP 62162552A JP 16255287 A JP16255287 A JP 16255287A JP S6417366 A JPS6417366 A JP S6417366A
Authority
JP
Japan
Prior art keywords
detector
probe
shutter means
control
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62162552A
Other languages
Japanese (ja)
Inventor
Edowaado Howaitohau Chiyaaruzu
Teireru Kurisutofuaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RINKU ANARITEIKARU Ltd
Original Assignee
RINKU ANARITEIKARU Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RINKU ANARITEIKARU Ltd filed Critical RINKU ANARITEIKARU Ltd
Priority to JP62162552A priority Critical patent/JPS6417366A/en
Publication of JPS6417366A publication Critical patent/JPS6417366A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To avoid a detector from excessive radiation exposure by providing a shutter means at the end on the detector side of a probe, to control the shutter means form the outside of an envelope located remote from the detector. CONSTITUTION: An electron and X-ray detecting device has a probe 2 stored in an envelope 7 and guided into an electron microscope and a semiconductor detector 1 mounted at one end of the probe 2. It is provided with a shutter means, arranged at the end on the detector 1 side of the probe 2, to completely or partially cover the detector 1 and a control means arranged remotely from the detector 1 to control the covering of the shutter means. In this way, damages to the detector 1, when exposed to excessive radiation, are prevented.
JP62162552A 1987-07-01 1987-07-01 Electron beam and x-ray detector Pending JPS6417366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62162552A JPS6417366A (en) 1987-07-01 1987-07-01 Electron beam and x-ray detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62162552A JPS6417366A (en) 1987-07-01 1987-07-01 Electron beam and x-ray detector

Publications (1)

Publication Number Publication Date
JPS6417366A true JPS6417366A (en) 1989-01-20

Family

ID=15756761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62162552A Pending JPS6417366A (en) 1987-07-01 1987-07-01 Electron beam and x-ray detector

Country Status (1)

Country Link
JP (1) JPS6417366A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295150U (en) * 1989-01-13 1990-07-30
JP2013513215A (en) * 2009-12-07 2013-04-18 オックスフォード インストルメンツ ナノテクノロジー ツールス リミテッド X-ray analyzer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143252A (en) * 1981-01-30 1982-09-04 Philips Nv Electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143252A (en) * 1981-01-30 1982-09-04 Philips Nv Electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0295150U (en) * 1989-01-13 1990-07-30
JP2013513215A (en) * 2009-12-07 2013-04-18 オックスフォード インストルメンツ ナノテクノロジー ツールス リミテッド X-ray analyzer

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