JPS6418072A - Detecting apparatus for voltage - Google Patents

Detecting apparatus for voltage

Info

Publication number
JPS6418072A
JPS6418072A JP62174535A JP17453587A JPS6418072A JP S6418072 A JPS6418072 A JP S6418072A JP 62174535 A JP62174535 A JP 62174535A JP 17453587 A JP17453587 A JP 17453587A JP S6418072 A JPS6418072 A JP S6418072A
Authority
JP
Japan
Prior art keywords
substance
voltages
grid
measured
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62174535A
Other languages
Japanese (ja)
Other versions
JPH0820470B2 (en
Inventor
Hironori Takahashi
Shinichiro Aoshima
Yutaka Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP62174535A priority Critical patent/JPH0820470B2/en
Priority to US07/217,790 priority patent/US4906922A/en
Priority to EP88111142A priority patent/EP0299432B1/en
Priority to DE3889986T priority patent/DE3889986T2/en
Publication of JPS6418072A publication Critical patent/JPS6418072A/en
Priority to US07/460,645 priority patent/US5034683A/en
Publication of JPH0820470B2 publication Critical patent/JPH0820470B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measurement Of Current Or Voltage (AREA)

Abstract

PURPOSE:To enable the simultaneous detection of voltages at a plurality of specified positions of a substance to be measured, by a method wherein a light beam from a light source is divided into a number of beams in a desired pattern and made to enter each specified part of an electrooptical material corresponding to a specified position of the substance to be measured. CONSTITUTION:The refractive indexes of the local parts of an electrooptical material 2 corresponding to voltages at a plurality of two-dimensional positions of a substance 3 to be measured are varied by these voltages. When a number of light beams divided in a grid-shaped pattern by a microlens array 5 proceed through a grid-shaped pattern in the material 2, accordingly, the polarized states of the beams are varied respectively by variations in a refractive index due to the voltages at the grid-shaped positions of the substance 3 located just below the material, and the polarized beams are outputted as emission lights from the material 2. These emission lights are given further to an analyzer 7 through a beam splitter 6. Since the intensity of each emission light is varied by the variation in the refractive index of the local part of the material 2 accompanying the variation in the voltage at each grid-shaped position of the substance 3 to be measured, only the voltages at the two-dimensional grid-shaped positions of the substance 3 can be detected simultaneously in a detector 9 on the basis of the variations in the intensities of the emission lights.
JP62174535A 1987-07-13 1987-07-13 Voltage detector Expired - Fee Related JPH0820470B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62174535A JPH0820470B2 (en) 1987-07-13 1987-07-13 Voltage detector
US07/217,790 US4906922A (en) 1987-07-13 1988-07-12 Voltage mapping device having fast time resolution
EP88111142A EP0299432B1 (en) 1987-07-13 1988-07-12 A voltage detecting device
DE3889986T DE3889986T2 (en) 1987-07-13 1988-07-12 Arrangement of a voltage detector.
US07/460,645 US5034683A (en) 1987-07-13 1990-01-03 Voltage detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62174535A JPH0820470B2 (en) 1987-07-13 1987-07-13 Voltage detector

Publications (2)

Publication Number Publication Date
JPS6418072A true JPS6418072A (en) 1989-01-20
JPH0820470B2 JPH0820470B2 (en) 1996-03-04

Family

ID=15980232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62174535A Expired - Fee Related JPH0820470B2 (en) 1987-07-13 1987-07-13 Voltage detector

Country Status (1)

Country Link
JP (1) JPH0820470B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0427843A (en) * 1989-08-02 1992-01-30 Hamamatsu Photonics Kk Low noise pulse light source using laser diode and voltage detector using the light source
EP0701140A2 (en) 1994-09-07 1996-03-13 Hamamatsu Photonics K.K. Checking apparatus for array electrode substrate
JPH08146051A (en) * 1994-11-21 1996-06-07 Nec Corp Eo probe
JP2008177579A (en) * 2007-01-22 2008-07-31 Wafermasters Inc Dynamic wafer stress processing system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0427843A (en) * 1989-08-02 1992-01-30 Hamamatsu Photonics Kk Low noise pulse light source using laser diode and voltage detector using the light source
EP0701140A2 (en) 1994-09-07 1996-03-13 Hamamatsu Photonics K.K. Checking apparatus for array electrode substrate
US5621521A (en) * 1994-09-07 1997-04-15 Hamamatsu Photonics K.K. Checking apparatus for array electrode substrate
JPH08146051A (en) * 1994-11-21 1996-06-07 Nec Corp Eo probe
JP2008177579A (en) * 2007-01-22 2008-07-31 Wafermasters Inc Dynamic wafer stress processing system

Also Published As

Publication number Publication date
JPH0820470B2 (en) 1996-03-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees