JPS6420679A - Laser apparatus - Google Patents
Laser apparatusInfo
- Publication number
- JPS6420679A JPS6420679A JP17583487A JP17583487A JPS6420679A JP S6420679 A JPS6420679 A JP S6420679A JP 17583487 A JP17583487 A JP 17583487A JP 17583487 A JP17583487 A JP 17583487A JP S6420679 A JPS6420679 A JP S6420679A
- Authority
- JP
- Japan
- Prior art keywords
- window
- disposed
- laser beam
- optical path
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 abstract 6
- 238000012544 monitoring process Methods 0.000 abstract 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 230000000644 propagated effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
- H01S3/027—Constructional details of solid state lasers, e.g. housings or mountings comprising a special atmosphere inside the housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/034—Optical devices within, or forming part of, the tube, e.g. windows, mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
- H01S3/08068—Holes; Stepped surface; Special cross-section
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08081—Unstable resonators
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Lasers (AREA)
Abstract
PURPOSE:To make a power sensor, which is disposed on the optical path of the reflected light from a window, to measure a laser output to reduce the deformation thereof owing to optical elements with the output being monitored, by making the window formed in a part of a sealed container to have a small reflectance, and by disposing the window so as to be oblique with respect to the plane which is perpendicular to the optical path of a laser beam. CONSTITUTION:A laser resonator in which a concave mirror 2 and a convex mirror 3 are so disposed as to be opposite each other in a sealed container 1 is disposed. The laser beam 5 generated by the resonator is changed the optical path thereof through a coupling mirror. The deflected laser beam 7 is propagated through a window 15 which is disposed in a part of the container 1 into the outside. Now, this window 15 is so formed as to have a small reflectance and is so disposed as to be oblique with respect to the plane which is perpendicular to the optical path of the laser beam 7. The reflected light from the window 15 is employed as a monitoring light 11, thereby the window 15 also serves as a beam splitter. And, the monitoring light 11 is measured by a power sensor 12 to reduce the deformation thereof owing to the optical elements, thereby the laser beam with high characteristics is output.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17583487A JPS6420679A (en) | 1987-07-16 | 1987-07-16 | Laser apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17583487A JPS6420679A (en) | 1987-07-16 | 1987-07-16 | Laser apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6420679A true JPS6420679A (en) | 1989-01-24 |
Family
ID=16003031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17583487A Pending JPS6420679A (en) | 1987-07-16 | 1987-07-16 | Laser apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420679A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03205884A (en) * | 1990-01-05 | 1991-09-09 | Mitsubishi Electric Corp | Laser oscillator |
| JP2013214746A (en) * | 2012-03-30 | 2013-10-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device for amplifying laser beam |
-
1987
- 1987-07-16 JP JP17583487A patent/JPS6420679A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03205884A (en) * | 1990-01-05 | 1991-09-09 | Mitsubishi Electric Corp | Laser oscillator |
| JP2013214746A (en) * | 2012-03-30 | 2013-10-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device for amplifying laser beam |
| KR101522766B1 (en) * | 2012-03-30 | 2015-05-26 | 트룸프 레이저-운트 시스템테크닉 게엠베하 | Device for amplifying a laser beam |
| US9306367B2 (en) | 2012-03-30 | 2016-04-05 | Trumpf Lasersystems For Semiconductor Manufacturing Gmbh | Device for amplifying a laser beam |
| TWI605655B (en) * | 2012-03-30 | 2017-11-11 | 創浦雷射系統半導體製造有限公司 | Device for amplifying a laser beam |
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