JPS6420717U - - Google Patents

Info

Publication number
JPS6420717U
JPS6420717U JP11578187U JP11578187U JPS6420717U JP S6420717 U JPS6420717 U JP S6420717U JP 11578187 U JP11578187 U JP 11578187U JP 11578187 U JP11578187 U JP 11578187U JP S6420717 U JPS6420717 U JP S6420717U
Authority
JP
Japan
Prior art keywords
power transformer
temperature sensor
temperature
primary
breaker
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11578187U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11578187U priority Critical patent/JPS6420717U/ja
Publication of JPS6420717U publication Critical patent/JPS6420717U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Emergency Alarm Devices (AREA)
  • Regulation Of General Use Transformers (AREA)

Description

【図面の簡単な説明】
第１図は本考案電源トランスの一例を用いた電
源回路の接続図、第２図は従来の電源トランスの
一例を用いた電源回路の接続図、第３図は従来に
おけるブレーカの協調曲線図である。 １…電源トランス、２…１次コイル、３…２次
コイル、４…温度センサ、５…ブレーカ、６…安
全装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 拡散・ＣＶＤ装置等の半導体製造装置の電気炉
    に使用される電源トランスにおいて、電源トラン
    ス１の１次コイル２及び２次コイル３に、この電
    源トランス１の焼損限界温度を検出する温度セン
    サ４を設け、これらの温度センサ４の検出信号を
    入力して１次側回路に介挿したブレーカ５の作動
    と、警報回路の作動を行う安全装置６を備えてな
    る温度センサ付き電源トランス。
JP11578187U 1987-07-27 1987-07-27 Pending JPS6420717U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11578187U JPS6420717U (ja) 1987-07-27 1987-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11578187U JPS6420717U (ja) 1987-07-27 1987-07-27

Publications (1)

Publication Number Publication Date
JPS6420717U true JPS6420717U (ja) 1989-02-01

Family

ID=31357740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11578187U Pending JPS6420717U (ja) 1987-07-27 1987-07-27

Country Status (1)

Country Link
JP (1) JPS6420717U (ja)

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