JPS6420736U - - Google Patents

Info

Publication number
JPS6420736U
JPS6420736U JP11572387U JP11572387U JPS6420736U JP S6420736 U JPS6420736 U JP S6420736U JP 11572387 U JP11572387 U JP 11572387U JP 11572387 U JP11572387 U JP 11572387U JP S6420736 U JPS6420736 U JP S6420736U
Authority
JP
Japan
Prior art keywords
break
outer ring
knurling
engaging portion
expanding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11572387U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11572387U priority Critical patent/JPS6420736U/ja
Publication of JPS6420736U publication Critical patent/JPS6420736U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Braking Arrangements (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの考案の一実施例によるリング装着
パレツトを示す平面図、第2図はこの考案の主要
部を示す拡大斜視図、第3図はこの考案の他の実
施例を示す平面図、第4図はその要部斜視図、第
5図は従来の主要部を示す平面図、第6図は従来
のリング装着パレツトを示す斜視図である。 図中、1はパレツト、2は内リング、3aは外
リング、3bはナーリング溝、4はガイドピン、
5b,5dはクランプ爪、5cはナーリング溝、
5eは突起である。なお、各図中同一符号は同一
又は相当部分を示す。
Fig. 1 is a plan view showing a ring mounting pallet according to one embodiment of this invention, Fig. 2 is an enlarged perspective view showing the main parts of this invention, and Fig. 3 is a plan view showing another embodiment of this invention. FIG. 4 is a perspective view of the main part thereof, FIG. 5 is a plan view showing the main part of the conventional ring mounting pallet, and FIG. 6 is a perspective view showing the conventional ring mounting pallet. In the figure, 1 is a pallet, 2 is an inner ring, 3a is an outer ring, 3b is a knurling groove, 4 is a guide pin,
5b and 5d are clamp claws, 5c is a knurling groove,
5e is a protrusion. Note that the same reference numerals in each figure indicate the same or equivalent parts.

Claims (1)

【実用新案登録請求の範囲】 (1) シート上のウエハをブレークエキスパンド
するブレークエキスパンド装置において、シート
を内リングとで挾持する外リングの外周には軸方
向のナーリング溝を連続して形成した大径部と、
この大径部に並列的に形成された円周溝を設ける
と共に、上記外リングを径方向外側から付勢する
クランプ爪には、上記ナーリング溝に係合し得る
係合部を設けたことを特徴とするブレークエキス
パンド装置。 (2) 係合部は外リングのナーリング溝に対応し
て形成されたナーリングであることを特徴とする
実用新案登録請求の範囲第1項記載のブレークエ
キスパンド装置。 (3) 係合部は外リングのナーリング溝に係合す
る突起であることを特徴とする実用新案登録請求
の範囲第1項記載のブレークエキスパンド装置。
[Claims for Utility Model Registration] (1) In a break-expanding device for break-expanding a wafer on a sheet, a large axial knurling groove is continuously formed on the outer periphery of an outer ring that holds the sheet between the inner ring and the inner ring. A diameter portion;
The large diameter portion is provided with circumferential grooves formed in parallel, and the clamp claw that urges the outer ring from the outside in the radial direction is provided with an engaging portion that can engage with the knurling groove. Features a break expander. (2) The break expanding device according to claim 1, wherein the engaging portion is a knurling formed to correspond to the knurling groove of the outer ring. (3) The break expanding device according to claim 1, wherein the engaging portion is a protrusion that engages with the knurling groove of the outer ring.
JP11572387U 1987-07-27 1987-07-27 Pending JPS6420736U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11572387U JPS6420736U (en) 1987-07-27 1987-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11572387U JPS6420736U (en) 1987-07-27 1987-07-27

Publications (1)

Publication Number Publication Date
JPS6420736U true JPS6420736U (en) 1989-02-01

Family

ID=31357631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11572387U Pending JPS6420736U (en) 1987-07-27 1987-07-27

Country Status (1)

Country Link
JP (1) JPS6420736U (en)

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