JPS642074U - - Google Patents
Info
- Publication number
- JPS642074U JPS642074U JP9316287U JP9316287U JPS642074U JP S642074 U JPS642074 U JP S642074U JP 9316287 U JP9316287 U JP 9316287U JP 9316287 U JP9316287 U JP 9316287U JP S642074 U JPS642074 U JP S642074U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sealed tube
- epitaxial layer
- forming material
- side edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 4
- 239000007791 liquid phase Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の液相エピタキシヤル成長装置
の基板支持具を示す斜視図、第２図は本考案の基
板支持具をエピタキシヤル成長装置に設置した場
合の状態を示す説明図、第３図ａより第３図ｄま
では、本考案のエピタキシヤル成長装置の動作の
説明図、第４図は従来の液相エピタキシヤル成長
装置の斜視図、第５図は第４図の―′線に沿
つた断面図、第６図は第４図の―′線に沿つ
た断面図、第７図は従来の基板支持具の斜視図で
ある。
図に於いて、１は石英管、６は基板、７はエピ
タキシヤル層形成材料、１１は基板支持具、１２
は底板、１３Ａ，１３Ｂ，１３Ｃ，１３Ｄは枠状
部、１４は側縁板、１５は酸化物を示す。
FIG. 1 is a perspective view showing the substrate support of the liquid phase epitaxial growth apparatus of the present invention, FIG. 2 is an explanatory view showing the state when the substrate support of the present invention is installed in the epitaxial growth apparatus, and FIG. Figures a to 3d are explanatory diagrams of the operation of the epitaxial growth apparatus of the present invention, Figure 4 is a perspective view of a conventional liquid phase epitaxial growth apparatus, and Figure 5 is a view taken along the line -' in Figure 4. 6 is a sectional view taken along line -' in FIG. 4, and FIG. 7 is a perspective view of a conventional substrate support. In the figure, 1 is a quartz tube, 6 is a substrate, 7 is an epitaxial layer forming material, 11 is a substrate support, 12
13A, 13B, 13C, and 13D are frame-like parts; 14 is a side edge plate; and 15 is an oxide.
Claims (1)
を保持し、かつエピタキシヤル層形成材料７を収
容するための円柱状部材２と、該円柱状部材が挿
入される封管１とからなり、前記封管１を回転さ
せて溶融したエピタキシヤル層形成材料７に前記
基板６を接触させて基板上にエピタキシヤル層を
形成する装置に於いて、 前記封管１の回転に伴つて溶融したエピタキシ
ヤル層形成材料７の表面の酸化物１５を除去する
ための側縁板１４を、前記基板支持具１１の少な
くとも片側の側縁部に封管の内壁方向に向かつて
張り出して設けたことを特徴とする液相エピタキ
シヤル成長装置。[Claims for Utility Model Registration] Epitaxial growth substrate 6 and substrate support 5
It consists of a cylindrical member 2 for holding and accommodating an epitaxial layer forming material 7, and a sealed tube 1 into which the cylindrical member is inserted, and the epitaxial layer is melted by rotating the sealed tube 1. In an apparatus for forming an epitaxial layer on the substrate by bringing the substrate 6 into contact with the forming material 7, removing the oxide 15 on the surface of the epitaxial layer forming material 7 that has melted as the sealed tube 1 rotates. A liquid phase epitaxial growth apparatus characterized in that a side edge plate 14 is provided on at least one side edge of the substrate support 11 so as to protrude toward the inner wall of the sealed tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9316287U JPS642074U (en) | 1987-06-16 | 1987-06-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9316287U JPS642074U (en) | 1987-06-16 | 1987-06-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642074U true JPS642074U (en) | 1989-01-09 |
Family
ID=30955504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9316287U Pending JPS642074U (en) | 1987-06-16 | 1987-06-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642074U (en) |
-
1987
- 1987-06-16 JP JP9316287U patent/JPS642074U/ja active Pending
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