JPS6421331A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS6421331A
JPS6421331A JP17729687A JP17729687A JPS6421331A JP S6421331 A JPS6421331 A JP S6421331A JP 17729687 A JP17729687 A JP 17729687A JP 17729687 A JP17729687 A JP 17729687A JP S6421331 A JPS6421331 A JP S6421331A
Authority
JP
Japan
Prior art keywords
diaphragm
zirconia
electrode
lower substrate
detector section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17729687A
Other languages
Japanese (ja)
Other versions
JPH0571893B2 (en
Inventor
Kazuharu Sasa
Noritatsu Sawada
Koichiro Taniguchi
Makoto Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JGC Corp
Original Assignee
JGC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JGC Corp filed Critical JGC Corp
Priority to JP17729687A priority Critical patent/JPS6421331A/en
Publication of JPS6421331A publication Critical patent/JPS6421331A/en
Publication of JPH0571893B2 publication Critical patent/JPH0571893B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To permit a smaller size and a less thickness along with a higher sensitivity, by forming at least a diaphragm of a detector section of a zirconia sheet. CONSTITUTION:A detector section is made in a capsule construction and a diaphragm 1 and a lower substrate 2 are stuck parallel facing each other and the clearance therebetween is evacuated to be sealed with glass 3. The diaphragm 1 is provided with an electrode 4a for a diaphragm and the lower substrate 2 is provided with an internal electrode 4b and an external electrode 4c. The diaphragm 1 employs a zirconia based sheet. It is desired that the zirconia sheet contains 2.0-6.0mol.% of yttrium trioxide (Y2O3).
JP17729687A 1987-07-17 1987-07-17 Pressure sensor Granted JPS6421331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17729687A JPS6421331A (en) 1987-07-17 1987-07-17 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17729687A JPS6421331A (en) 1987-07-17 1987-07-17 Pressure sensor

Publications (2)

Publication Number Publication Date
JPS6421331A true JPS6421331A (en) 1989-01-24
JPH0571893B2 JPH0571893B2 (en) 1993-10-08

Family

ID=16028530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17729687A Granted JPS6421331A (en) 1987-07-17 1987-07-17 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS6421331A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0441644U (en) * 1990-08-08 1992-04-08
JPH0447641U (en) * 1990-08-24 1992-04-22

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50149549A (en) * 1974-05-24 1975-11-29
JPS6075555A (en) * 1983-09-30 1985-04-27 Toshiba Corp Diaphragm

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50149549A (en) * 1974-05-24 1975-11-29
JPS6075555A (en) * 1983-09-30 1985-04-27 Toshiba Corp Diaphragm

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0441644U (en) * 1990-08-08 1992-04-08
JPH0447641U (en) * 1990-08-24 1992-04-22

Also Published As

Publication number Publication date
JPH0571893B2 (en) 1993-10-08

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