JPS642174A - Fine pattern detector - Google Patents

Fine pattern detector

Info

Publication number
JPS642174A
JPS642174A JP62156501A JP15650187A JPS642174A JP S642174 A JPS642174 A JP S642174A JP 62156501 A JP62156501 A JP 62156501A JP 15650187 A JP15650187 A JP 15650187A JP S642174 A JPS642174 A JP S642174A
Authority
JP
Japan
Prior art keywords
polarizing
detected
optical system
fine pattern
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156501A
Other languages
Japanese (ja)
Other versions
JPH012174A (en
Inventor
Satoshi Iwata
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62156501A priority Critical patent/JPS642174A/en
Publication of JPH012174A publication Critical patent/JPH012174A/en
Publication of JPS642174A publication Critical patent/JPS642174A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Input (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

PURPOSE: To simplify the adjustment of an optical system and to improve a detecting speed by using a straight line polarizing transforming means, a polarizing beam a plitter, a polarizing filter with a slit and a quarter wavelength plate 5 in an optical path and applying the convergence and the polarization of a lens to constitute the optical system.
CONSTITUTION: The straight line polarizing transforming means 2, the polarizing beam splitter 3, the polarizing filter 4 with the slit and the quater wavelength plate 5 are used in the optical path, the convergence and the polarization of the lens are used to constitute the optical system. Thereby, a line illuminating light is irradiated on an object 9 to be detected by one objective lens 6 without using a movable part, the line illuminating light reflected on the object 9 to be detected is detected to detect the fine pattern of the object to be detected.
COPYRIGHT: (C)1989,JPO&Japio
JP62156501A 1987-06-25 1987-06-25 Fine pattern detector Pending JPS642174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156501A JPS642174A (en) 1987-06-25 1987-06-25 Fine pattern detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156501A JPS642174A (en) 1987-06-25 1987-06-25 Fine pattern detector

Publications (2)

Publication Number Publication Date
JPH012174A JPH012174A (en) 1989-01-06
JPS642174A true JPS642174A (en) 1989-01-06

Family

ID=15629142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156501A Pending JPS642174A (en) 1987-06-25 1987-06-25 Fine pattern detector

Country Status (1)

Country Link
JP (1) JPS642174A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993006687A1 (en) * 1991-09-26 1993-04-01 Seiko Epson Corporation Image reader

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993006687A1 (en) * 1991-09-26 1993-04-01 Seiko Epson Corporation Image reader
US5596360A (en) * 1991-09-26 1997-01-21 Seiko Epson Corporation Image reading apparatus with a half mirror

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