JPS642353U - - Google Patents
Info
- Publication number
- JPS642353U JPS642353U JP9694987U JP9694987U JPS642353U JP S642353 U JPS642353 U JP S642353U JP 9694987 U JP9694987 U JP 9694987U JP 9694987 U JP9694987 U JP 9694987U JP S642353 U JPS642353 U JP S642353U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- holder
- upstream
- tilted
- faraday flag
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9694987U JPS642353U (2) | 1987-06-24 | 1987-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9694987U JPS642353U (2) | 1987-06-24 | 1987-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS642353U true JPS642353U (2) | 1989-01-09 |
Family
ID=30963327
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9694987U Pending JPS642353U (2) | 1987-06-24 | 1987-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS642353U (2) |
-
1987
- 1987-06-24 JP JP9694987U patent/JPS642353U/ja active Pending
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