JPS6424181A - Dry vacuum pump system - Google Patents

Dry vacuum pump system

Info

Publication number
JPS6424181A
JPS6424181A JP17849487A JP17849487A JPS6424181A JP S6424181 A JPS6424181 A JP S6424181A JP 17849487 A JP17849487 A JP 17849487A JP 17849487 A JP17849487 A JP 17849487A JP S6424181 A JPS6424181 A JP S6424181A
Authority
JP
Japan
Prior art keywords
proximity
delivery port
temperature
vacuum pump
dry vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17849487A
Other languages
Japanese (ja)
Inventor
Riichi Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP17849487A priority Critical patent/JPS6424181A/en
Publication of JPS6424181A publication Critical patent/JPS6424181A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent reaction products from sticking in proximity of a delivery port by providing a delivery side temperature sensor in proximity of the delivery port of a dry vacuum pump used for the manufacturing device of semi- conductors so as to have a temperature control section keeping the temperature in proximity of the delivery port at a specified temperature. CONSTITUTION:A delivery side temperature sensor 4 is provided in proximity of the delivery port 9 of a dry vacuum pump 1. Water is supplied to a cooling jacket 7 through a supply channel 12 so as to be discharged from a drain channel 13. The temperature in proximity of the delivery port 9 of the dry vacuum pump 1 is detected by the delivery side temperature sensor 4. A temperature control section 14 is thereby actuated so as to control the flow rate in the supply and drain channels 12 and 13 for controlling the temperature in proximity of the delivery port 9 at a specified temperature. This constitution may prevent the reaction product NH3CL from sticking in proximity of the delivery port, thereby lengthening significantly the maintenance period thereof.
JP17849487A 1987-07-17 1987-07-17 Dry vacuum pump system Pending JPS6424181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17849487A JPS6424181A (en) 1987-07-17 1987-07-17 Dry vacuum pump system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17849487A JPS6424181A (en) 1987-07-17 1987-07-17 Dry vacuum pump system

Publications (1)

Publication Number Publication Date
JPS6424181A true JPS6424181A (en) 1989-01-26

Family

ID=16049433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17849487A Pending JPS6424181A (en) 1987-07-17 1987-07-17 Dry vacuum pump system

Country Status (1)

Country Link
JP (1) JPS6424181A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325893U (en) * 1989-07-24 1991-03-18
JPH04164187A (en) * 1990-10-25 1992-06-09 Shimadzu Corp turbo molecular pump
JP2018071210A (en) * 2016-10-31 2018-05-10 範多機械株式会社 Sludge suction car

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0325893U (en) * 1989-07-24 1991-03-18
JPH04164187A (en) * 1990-10-25 1992-06-09 Shimadzu Corp turbo molecular pump
JP2018071210A (en) * 2016-10-31 2018-05-10 範多機械株式会社 Sludge suction car

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