JPS6425559A - Manufacture of mis type semiconductor device - Google Patents
Manufacture of mis type semiconductor deviceInfo
- Publication number
- JPS6425559A JPS6425559A JP62182577A JP18257787A JPS6425559A JP S6425559 A JPS6425559 A JP S6425559A JP 62182577 A JP62182577 A JP 62182577A JP 18257787 A JP18257787 A JP 18257787A JP S6425559 A JPS6425559 A JP S6425559A
- Authority
- JP
- Japan
- Prior art keywords
- element isolating
- mask
- oxide films
- isolating oxide
- isolated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To implement high integration density, by forming a single opening pattern for a mask, which controls each threshold voltage value, between a plurality of neighboring transistors, which have the same configurations and are isolated by element isolating oxide films. CONSTITUTION:Element isolating oxide films 1 are formed on a semiconductor substrate by using a LOCOS method and the like. Resist 2 for an ion implantation mask is formed by a photolithography step. Then, arsenic(As) ions and the like are implanted, and ion implanted regions 3 are formed in the semiconductor substrate. Thus depression type N channels are formed. A single opening pattern in the mask resist 2 for controlling a threshold voltage value is laid out between a plurality of neighboring transistors, which are isolated by the element isolating oxide films 1 through each element isolating region. Thus the patterning accuracy of the mask corresponding to the ROM code of each MIS type transistor is improved.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62182577A JPS6425559A (en) | 1987-07-22 | 1987-07-22 | Manufacture of mis type semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62182577A JPS6425559A (en) | 1987-07-22 | 1987-07-22 | Manufacture of mis type semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6425559A true JPS6425559A (en) | 1989-01-27 |
Family
ID=16120714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62182577A Pending JPS6425559A (en) | 1987-07-22 | 1987-07-22 | Manufacture of mis type semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6425559A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6337003B1 (en) | 1998-08-19 | 2002-01-08 | Shibaura Mechatronics Corporation | Vacuum apparatus and driving mechanism therefor |
| JP2008101743A (en) * | 2006-10-20 | 2008-05-01 | Toyota Motor Corp | Belt type continuously variable transmission |
| JP2009168198A (en) * | 2008-01-18 | 2009-07-30 | Nsk Ltd | Toroidal continuously variable transmission |
| JP2009257534A (en) * | 2008-04-18 | 2009-11-05 | Toyota Motor Corp | Belt-type continuously variable transmission |
-
1987
- 1987-07-22 JP JP62182577A patent/JPS6425559A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6337003B1 (en) | 1998-08-19 | 2002-01-08 | Shibaura Mechatronics Corporation | Vacuum apparatus and driving mechanism therefor |
| JP2008101743A (en) * | 2006-10-20 | 2008-05-01 | Toyota Motor Corp | Belt type continuously variable transmission |
| JP2009168198A (en) * | 2008-01-18 | 2009-07-30 | Nsk Ltd | Toroidal continuously variable transmission |
| JP2009257534A (en) * | 2008-04-18 | 2009-11-05 | Toyota Motor Corp | Belt-type continuously variable transmission |
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