JPS6425973A - Vapor deposition device of thin film - Google Patents
Vapor deposition device of thin filmInfo
- Publication number
- JPS6425973A JPS6425973A JP18107787A JP18107787A JPS6425973A JP S6425973 A JPS6425973 A JP S6425973A JP 18107787 A JP18107787 A JP 18107787A JP 18107787 A JP18107787 A JP 18107787A JP S6425973 A JPS6425973 A JP S6425973A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- thin film
- clusters
- cluster
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 3
- 238000007740 vapor deposition Methods 0.000 title 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE:To prevent generation of breakdown and to enable deposition in a long time and to obtain a thin film with excellent production efficiency by integrating both the ionization part of a cluster and the heating part of a crucible into one body and controlling the ionization rate of the cluster by the position of the crucible. CONSTITUTION:Both the ionization part of a cluster and the heating part of a crucible are integrated into one body and high-purity silicon 1 of vapor-depositional substance is filled in the crucible 2 which is made of tantalum and has a silicified inner wall, and 20-25A current is allowed to flow to a filament 3 via an electric source 4 and thermions are generated and accelerated with about 2kV voltage impressed between the filament 3 and the crucible 2 by an electric source 5 and projected to the crucible 2 to heat it and high-purity silicon 1 is fused. Then one part of clusters 12 formed from silicon vapor which is jetted to the outside of the crucible 2 through a small hole 14 of the crucible 2 wherein the outside is evacuated at about 10<-7>Torr pressure is ionized by projection of thermions and accelerated with voltage impressed between the crucible 2, a substrate 13 and pulling electrodes 15. The ionization rate of the clusters 12 is controlled by changing the position of the crucible 2 for the substrate 13 to required height via gears 21, 22 and the clusters 12 are deposited on the substrate to form a thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18107787A JPS6425973A (en) | 1987-07-22 | 1987-07-22 | Vapor deposition device of thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18107787A JPS6425973A (en) | 1987-07-22 | 1987-07-22 | Vapor deposition device of thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6425973A true JPS6425973A (en) | 1989-01-27 |
Family
ID=16094405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18107787A Pending JPS6425973A (en) | 1987-07-22 | 1987-07-22 | Vapor deposition device of thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6425973A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005097730A (en) * | 2003-08-15 | 2005-04-14 | Semiconductor Energy Lab Co Ltd | Film-forming apparatus and manufacturing apparatus |
| US8123862B2 (en) | 2003-08-15 | 2012-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Deposition apparatus and manufacturing apparatus |
-
1987
- 1987-07-22 JP JP18107787A patent/JPS6425973A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005097730A (en) * | 2003-08-15 | 2005-04-14 | Semiconductor Energy Lab Co Ltd | Film-forming apparatus and manufacturing apparatus |
| US8123862B2 (en) | 2003-08-15 | 2012-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Deposition apparatus and manufacturing apparatus |
| US8524313B2 (en) | 2003-08-15 | 2013-09-03 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a device |
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