JPS6426019A - Static pressure gas bearing device - Google Patents

Static pressure gas bearing device

Info

Publication number
JPS6426019A
JPS6426019A JP62179439A JP17943987A JPS6426019A JP S6426019 A JPS6426019 A JP S6426019A JP 62179439 A JP62179439 A JP 62179439A JP 17943987 A JP17943987 A JP 17943987A JP S6426019 A JPS6426019 A JP S6426019A
Authority
JP
Japan
Prior art keywords
pad
pressure gas
static pressure
gas bearing
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62179439A
Other languages
Japanese (ja)
Inventor
Riichi Murakoshi
Akira Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62179439A priority Critical patent/JPS6426019A/en
Publication of JPS6426019A publication Critical patent/JPS6426019A/en
Pending legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To facilitate the process of forming a bearing pattern by attaching a pad finished with the bearing pattern to a slider. CONSTITUTION:A pad 6 is formed through the process that a bearing pattern 7 for a static pressure gas bearing is finished beforehand on a small part. A static pressure gas bearing device is formed by attaching the pad 6 to a main body. In this manner, as the process of forming the bearing pattern 7 is performed on the small part, the process can be done easily and the mechanical processing accuracy can be improved. A clearance adjustment can also be performed by only grinding the attaching surface of the pad 6. Further, since the measurement of rigidity can be used on the other hand, uniformity of an amount off flotation can be achieved by giving a difference in the rigidity such as employing a high rigidity pad to the heavy load portion, in consideration with the dispersion of a load. The pad can be used in compliance with suitable usage there of by standardizing the pad.
JP62179439A 1987-07-17 1987-07-17 Static pressure gas bearing device Pending JPS6426019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62179439A JPS6426019A (en) 1987-07-17 1987-07-17 Static pressure gas bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62179439A JPS6426019A (en) 1987-07-17 1987-07-17 Static pressure gas bearing device

Publications (1)

Publication Number Publication Date
JPS6426019A true JPS6426019A (en) 1989-01-27

Family

ID=16065884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62179439A Pending JPS6426019A (en) 1987-07-17 1987-07-17 Static pressure gas bearing device

Country Status (1)

Country Link
JP (1) JPS6426019A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297787A (en) * 1989-02-14 1990-12-10 Nippon Seiko Kk Slide device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297787A (en) * 1989-02-14 1990-12-10 Nippon Seiko Kk Slide device

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