JPS6426104A - Appearance inspecting device for semiconductor device - Google Patents

Appearance inspecting device for semiconductor device

Info

Publication number
JPS6426104A
JPS6426104A JP18416287A JP18416287A JPS6426104A JP S6426104 A JPS6426104 A JP S6426104A JP 18416287 A JP18416287 A JP 18416287A JP 18416287 A JP18416287 A JP 18416287A JP S6426104 A JPS6426104 A JP S6426104A
Authority
JP
Japan
Prior art keywords
light
semiconductor device
cameras
inspection
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18416287A
Other languages
Japanese (ja)
Other versions
JPH0749934B2 (en
Inventor
Tsumio Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62184162A priority Critical patent/JPH0749934B2/en
Publication of JPS6426104A publication Critical patent/JPS6426104A/en
Publication of JPH0749934B2 publication Critical patent/JPH0749934B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To simply inspect the appearance of a semiconductor device by providing a light shield plate and shielding the light so that the lighting of each inspection part does not exert any influence upon TV cameras at other detection parts. CONSTITUTION:The semiconductor device 1 which is conveyed on a guide ratio 2 is detected by one sensor which is not shown in a figure and lighting devices 8, 8a, and 8b of respective inspection parts 3-6 emit flash light with the detection signal of the sensor to light the respective inspection positions. At this time, the respective inspection parts 3-6 are shielded by light shield plates 10-13, etc., from the light and the light beams from the respective lighting devices 8 are not made incident on the TV cameras 9 at other inspection parts, so the respective TV cameras 9 photograph the left and right lead flanks, lead reverse surface, and mark surface of the semiconductor device 1 irradiated by the lighting device to obtain respective images.
JP62184162A 1987-07-22 1987-07-22 Appearance inspection system for semiconductor devices Expired - Lifetime JPH0749934B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62184162A JPH0749934B2 (en) 1987-07-22 1987-07-22 Appearance inspection system for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62184162A JPH0749934B2 (en) 1987-07-22 1987-07-22 Appearance inspection system for semiconductor devices

Publications (2)

Publication Number Publication Date
JPS6426104A true JPS6426104A (en) 1989-01-27
JPH0749934B2 JPH0749934B2 (en) 1995-05-31

Family

ID=16148449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62184162A Expired - Lifetime JPH0749934B2 (en) 1987-07-22 1987-07-22 Appearance inspection system for semiconductor devices

Country Status (1)

Country Link
JP (1) JPH0749934B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0599635A (en) * 1991-10-08 1993-04-23 Seiwa Sangyo Kk Appearance inspection device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622113A (en) * 1985-06-28 1987-01-08 Ando Electric Co Ltd Surface roughness meter using reflected light
JPS6236510A (en) * 1985-08-12 1987-02-17 Nec Kyushu Ltd Detecting sensor for bend of lead

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622113A (en) * 1985-06-28 1987-01-08 Ando Electric Co Ltd Surface roughness meter using reflected light
JPS6236510A (en) * 1985-08-12 1987-02-17 Nec Kyushu Ltd Detecting sensor for bend of lead

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0599635A (en) * 1991-10-08 1993-04-23 Seiwa Sangyo Kk Appearance inspection device

Also Published As

Publication number Publication date
JPH0749934B2 (en) 1995-05-31

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