JPS64265A - Film forming device - Google Patents

Film forming device

Info

Publication number
JPS64265A
JPS64265A JP15344887A JP15344887A JPS64265A JP S64265 A JPS64265 A JP S64265A JP 15344887 A JP15344887 A JP 15344887A JP 15344887 A JP15344887 A JP 15344887A JP S64265 A JPS64265 A JP S64265A
Authority
JP
Japan
Prior art keywords
film
stress
control part
substrate
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15344887A
Other languages
Japanese (ja)
Other versions
JP2529267B2 (en
JPH01265A (en
Inventor
Mitsuo Nakabashi
Hideto Sano
Hisanori Hayashi
Takeshi Osato
Hiroichi Goto
Shuzo Abiko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Electronics Inc
Original Assignee
Canon Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Electronics Inc filed Critical Canon Electronics Inc
Priority to JP62153448A priority Critical patent/JP2529267B2/en
Publication of JPH01265A publication Critical patent/JPH01265A/en
Publication of JPS64265A publication Critical patent/JPS64265A/en
Application granted granted Critical
Publication of JP2529267B2 publication Critical patent/JP2529267B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To control the stress of a film to a desired value without closely checking the film forming condition during formation of the film by providing a control means for controlling the film forming condition in response to the stress of the film being formed detected by a film stress detecting means.
CONSTITUTION: A film is formed on a substrate 8 fixed to the electrically conductive substrate holder 7 in a chamber 1 contg. a reduced-pressure gas atmosphere. In such a device, a substrate heater 11 and a stress sensor 12 are arranged in the holder 7. The warpage of the substrate 8 caused by the film stress as the film is formed is detected by the sensor 12, and the value is converted to terms of stress. The signal from a film stress detecting part 21 is inputted to a film forming condition control part 20. A gas pressure control part 22 for controlling a gas inlet valve 2, a substrate temp. control part 23 for controlling the heater 11, and a bias voltage control part 24 for impressing a bias voltage on the holder 7 are controlled by the control part 20. The stress of the film being formed is controlled to a desired value. The stress detected by the sensor 12 is compared with the desired stress by the film stress detecting part 21, and the comparison result is outputted.
COPYRIGHT: (C)1989,JPO&Japio
JP62153448A 1987-06-22 1987-06-22 Film forming equipment Expired - Lifetime JP2529267B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62153448A JP2529267B2 (en) 1987-06-22 1987-06-22 Film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62153448A JP2529267B2 (en) 1987-06-22 1987-06-22 Film forming equipment

Publications (3)

Publication Number Publication Date
JPH01265A JPH01265A (en) 1989-01-05
JPS64265A true JPS64265A (en) 1989-01-05
JP2529267B2 JP2529267B2 (en) 1996-08-28

Family

ID=15562774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62153448A Expired - Lifetime JP2529267B2 (en) 1987-06-22 1987-06-22 Film forming equipment

Country Status (1)

Country Link
JP (1) JP2529267B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05247647A (en) * 1991-12-06 1993-09-24 Hughes Aircraft Co Optical coatings having a plurality of predetermined characteristics and its production
JPH06132554A (en) * 1991-01-29 1994-05-13 Optical Coating Lab Inc Thin film coating and method of forming the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63290259A (en) * 1987-05-23 1988-11-28 Agency Of Ind Science & Technol Method for relieving internal stress of amorphous tungsten compound film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63290259A (en) * 1987-05-23 1988-11-28 Agency Of Ind Science & Technol Method for relieving internal stress of amorphous tungsten compound film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132554A (en) * 1991-01-29 1994-05-13 Optical Coating Lab Inc Thin film coating and method of forming the same
JPH05247647A (en) * 1991-12-06 1993-09-24 Hughes Aircraft Co Optical coatings having a plurality of predetermined characteristics and its production

Also Published As

Publication number Publication date
JP2529267B2 (en) 1996-08-28

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