JPS6426831U - - Google Patents
Info
- Publication number
- JPS6426831U JPS6426831U JP1987122753U JP12275387U JPS6426831U JP S6426831 U JPS6426831 U JP S6426831U JP 1987122753 U JP1987122753 U JP 1987122753U JP 12275387 U JP12275387 U JP 12275387U JP S6426831 U JPS6426831 U JP S6426831U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- small hole
- manufacturing
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122753U JPS6426831U (bs) | 1987-08-10 | 1987-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987122753U JPS6426831U (bs) | 1987-08-10 | 1987-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426831U true JPS6426831U (bs) | 1989-02-15 |
Family
ID=31370977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987122753U Pending JPS6426831U (bs) | 1987-08-10 | 1987-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426831U (bs) |
-
1987
- 1987-08-10 JP JP1987122753U patent/JPS6426831U/ja active Pending