JPS6426844U - - Google Patents

Info

Publication number
JPS6426844U
JPS6426844U JP1987122882U JP12288287U JPS6426844U JP S6426844 U JPS6426844 U JP S6426844U JP 1987122882 U JP1987122882 U JP 1987122882U JP 12288287 U JP12288287 U JP 12288287U JP S6426844 U JPS6426844 U JP S6426844U
Authority
JP
Japan
Prior art keywords
carrier
tilting
counting device
wafer
wafer counting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987122882U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987122882U priority Critical patent/JPS6426844U/ja
Publication of JPS6426844U publication Critical patent/JPS6426844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Controlling Sheets Or Webs (AREA)

Description

【図面の簡単な説明】
第１図〜第３図は、この考案の実施例を示す図
で、第１図は、使用状態を示す図、第２図は、第
１図の要部拡大断面図、第３図は、ウエハ計測前
の状態を示す断面図で第２図に相当する図第４図
は、他の実施例を示す正面図、第５図、第６図、
第７図は、それぞれ従来例を示す図である。 １０……キヤリヤ、１１……ウエハ溝、１２…
…ウエハ、１３……傾斜装置、１４……キヤリヤ
テーブル。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) キヤリアを、その長手方向に傾斜せしめる
    手段を備えたウエハ計数装置。 (2) 前記手段が、キヤリヤテーブルに設けた傾
    斜装置であることを特徴とする実用新案登録請求
    の範囲第１項記載のウエハ計数装置。
JP1987122882U 1987-08-11 1987-08-11 Pending JPS6426844U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987122882U JPS6426844U (ja) 1987-08-11 1987-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987122882U JPS6426844U (ja) 1987-08-11 1987-08-11

Publications (1)

Publication Number Publication Date
JPS6426844U true JPS6426844U (ja) 1989-02-15

Family

ID=31371228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987122882U Pending JPS6426844U (ja) 1987-08-11 1987-08-11

Country Status (1)

Country Link
JP (1) JPS6426844U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157230A (ja) * 1984-01-11 1985-08-17 Telmec Co Ltd 半導体ウエハ搬送方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157230A (ja) * 1984-01-11 1985-08-17 Telmec Co Ltd 半導体ウエハ搬送方法

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