JPS64271A - Microwave plasma cvd device - Google Patents

Microwave plasma cvd device

Info

Publication number
JPS64271A
JPS64271A JP62153503A JP15350387A JPS64271A JP S64271 A JPS64271 A JP S64271A JP 62153503 A JP62153503 A JP 62153503A JP 15350387 A JP15350387 A JP 15350387A JP S64271 A JPS64271 A JP S64271A
Authority
JP
Japan
Prior art keywords
plasma
carrier
film
magnetic field
produce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62153503A
Other languages
English (en)
Other versions
JPH01271A (ja
Inventor
Satoru Sugita
Shotaro Okabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP62153503A priority Critical patent/JPS64271A/ja
Publication of JPH01271A publication Critical patent/JPH01271A/ja
Publication of JPS64271A publication Critical patent/JPS64271A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/05—Organic bonding materials; Methods for coating a substrate with a photoconductive layer; Inert supplements for use in photoconductive layers
    • G03G5/0525—Coating methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
  • Light Receiving Elements (AREA)
JP62153503A 1987-06-22 1987-06-22 Microwave plasma cvd device Pending JPS64271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62153503A JPS64271A (en) 1987-06-22 1987-06-22 Microwave plasma cvd device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62153503A JPS64271A (en) 1987-06-22 1987-06-22 Microwave plasma cvd device

Publications (2)

Publication Number Publication Date
JPH01271A JPH01271A (ja) 1989-01-05
JPS64271A true JPS64271A (en) 1989-01-05

Family

ID=15563981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62153503A Pending JPS64271A (en) 1987-06-22 1987-06-22 Microwave plasma cvd device

Country Status (1)

Country Link
JP (1) JPS64271A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994023088A1 (de) * 1993-03-30 1994-10-13 Robert Bosch Gmbh Vorrichtung zur herstellung einer plasmapolymerschutzschicht auf werkstücken, insbesondere scheinwerferreflektoren

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994023088A1 (de) * 1993-03-30 1994-10-13 Robert Bosch Gmbh Vorrichtung zur herstellung einer plasmapolymerschutzschicht auf werkstücken, insbesondere scheinwerferreflektoren
US5520741A (en) * 1993-03-30 1996-05-28 Robert Bosch Gmbh Apparatus for producing a plasma polymer protective layer on workpieces, in particular headlamp reflectors

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