JPS6427649U - - Google Patents
Info
- Publication number
- JPS6427649U JPS6427649U JP12208887U JP12208887U JPS6427649U JP S6427649 U JPS6427649 U JP S6427649U JP 12208887 U JP12208887 U JP 12208887U JP 12208887 U JP12208887 U JP 12208887U JP S6427649 U JPS6427649 U JP S6427649U
- Authority
- JP
- Japan
- Prior art keywords
- light
- spot light
- detected
- focus state
- spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 230000007547 defect Effects 0.000 claims description 3
- 230000005856 abnormality Effects 0.000 claims description 2
- 230000002950 deficient Effects 0.000 claims 1
- 230000002123 temporal effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図は本考案の一実施例の表面欠陥検出装置
におけるスポツト光の焦点状態検出装置を示すブ
ロツク図、第２図は第１図の回路動作を説明する
説明図、第３図は従来の表面欠陥検出装置の検出
部の一例を説明する説明図、第４図及び第５図は
他の従来例を説明する説明図である。
１……アナログ受光器、２……増幅回路、３…
…微分回路、５……異常検出回路。
FIG. 1 is a block diagram showing a spot light focus state detection device in a surface defect detection device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram explaining the circuit operation of FIG. 1, and FIG. 3 is a conventional one. An explanatory diagram illustrating an example of a detection section of a surface defect detection device, and FIGS. 4 and 5 are explanatory diagrams illustrating other conventional examples. 1...Analog receiver, 2...Amplification circuit, 3...
... Differential circuit, 5... Abnormality detection circuit.
Claims (1)
速度で相対的に横断移動させ、被検出体からの反
射光又は透過光を受光器にて受光し、被検出体の
表面状態に応じた電気信号を出力する検出部と、 この検出部からの電気信号を微分することによ
り、前記スポツト光が前記被検出体端部を通過し
たときに生ずる前記受光器の受光量の時間的変化
の緩急を検出し、被検出体上での前記スポツト光
の焦点状態に対応した振幅のパルス状信号を得る
微分回路と、 この微分回路からのパルス状信号の振幅が所定
レベル以上にあるか否かを判別し、所定レベルよ
り小さければ前記スポツト光の焦点状態が不良で
あると判断する異常検出回路とを具備したことを
特徴とする表面欠陥検出装置におけるスポツト光
の焦点状態検出装置。[Scope of Claim for Utility Model Registration] Spot light from a projector is moved relatively across the object to be detected at a predetermined speed, and the reflected light or transmitted light from the object to be detected is received by a light receiver. a detection section that outputs an electrical signal according to the surface condition of the body; and a light reception by the light receiver that occurs when the spot light passes through the end of the detected object by differentiating the electrical signal from the detection section. a differentiating circuit that detects the slowness and rapidity of temporal changes in the amount of light and obtains a pulse-like signal with an amplitude corresponding to the focal state of the spot light on the object to be detected; The focus state of the spot light in the surface defect detection device is characterized by comprising: an abnormality detection circuit that determines whether the focus state of the spot light is above a predetermined level and determines that the focus state of the spot light is defective if it is smaller than a predetermined level. Detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12208887U JPS6427649U (en) | 1987-08-11 | 1987-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12208887U JPS6427649U (en) | 1987-08-11 | 1987-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6427649U true JPS6427649U (en) | 1989-02-17 |
Family
ID=31369686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12208887U Pending JPS6427649U (en) | 1987-08-11 | 1987-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6427649U (en) |
-
1987
- 1987-08-11 JP JP12208887U patent/JPS6427649U/ja active Pending
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