JPS6427844U - - Google Patents
Info
- Publication number
- JPS6427844U JPS6427844U JP8278087U JP8278087U JPS6427844U JP S6427844 U JPS6427844 U JP S6427844U JP 8278087 U JP8278087 U JP 8278087U JP 8278087 U JP8278087 U JP 8278087U JP S6427844 U JPS6427844 U JP S6427844U
- Authority
- JP
- Japan
- Prior art keywords
- moving
- sets
- moving plate
- mechanisms
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims 7
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Mechanical Control Devices (AREA)
Description
第１図は本実施例を示す断面図、第２図は本実
施例のピポツト支持部分を表わす斜視図、第３図
は本実施例の傾き調整方法を示す説明図、第４図
は従来の例を示す断面図である。 １…探針、２…試料、３…移動板、６…マイク
ロメータヘツド、７…軸Ａ、８…軸Ｂ。
施例のピポツト支持部分を表わす斜視図、第３図
は本実施例の傾き調整方法を示す説明図、第４図
は従来の例を示す断面図である。 １…探針、２…試料、３…移動板、６…マイク
ロメータヘツド、７…軸Ａ、８…軸Ｂ。
Claims (1)
- 探針と試料の位置合わせを一軸方向に行うため
の精密位置決め機構において、該機構が２組の移
動機構と試料が保持される移動板とから成り、該
移動板は前記２組の移動機構で支持され、粗送り
は前記２組の移動機構で前記移動板を平行移動さ
せて行い、微動送りは片側の移動機構で前記移動
板を傾ける移動量を縮小して行うことを特徴とす
る精密位置決め機構。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987082780U JPH0726730Y2 (ja) | 1987-05-29 | 1987-05-29 | 精密位置決め機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987082780U JPH0726730Y2 (ja) | 1987-05-29 | 1987-05-29 | 精密位置決め機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6427844U true JPS6427844U (ja) | 1989-02-17 |
| JPH0726730Y2 JPH0726730Y2 (ja) | 1995-06-14 |
Family
ID=31307521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987082780U Expired - Lifetime JPH0726730Y2 (ja) | 1987-05-29 | 1987-05-29 | 精密位置決め機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726730Y2 (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5257567U (ja) * | 1975-10-22 | 1977-04-26 |
-
1987
- 1987-05-29 JP JP1987082780U patent/JPH0726730Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5257567U (ja) * | 1975-10-22 | 1977-04-26 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0726730Y2 (ja) | 1995-06-14 |
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