JPS6428372A - Substrate holding mechanism - Google Patents
Substrate holding mechanismInfo
- Publication number
- JPS6428372A JPS6428372A JP18472087A JP18472087A JPS6428372A JP S6428372 A JPS6428372 A JP S6428372A JP 18472087 A JP18472087 A JP 18472087A JP 18472087 A JP18472087 A JP 18472087A JP S6428372 A JPS6428372 A JP S6428372A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- medium
- substrate holding
- periphery
- optical recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title abstract 9
- 239000010408 film Substances 0.000 abstract 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To obtain a substrate holding mechanism enabling the production of an unscratched magneto-optical recording medium on a discoid substrate or a thin film, by providing an angle to each contact part between the periphery of the substrate and a substrate fitting jig. CONSTITUTION:In a side sputtering device in which a plastic discoid substrate 2 and a target are placed opposite to each other, 5 deg. angle is provided to the substrate holding parts A, A' (especially to the film forming surface sides) of a rotating and revolving Al jig 1 which brings the substrate 2 into rotation and revolution. Thus, the damage of the substrate 2 on the film forming surface side can be prevented. The external appearance of a formed magneto-optical recording medium is improved and the initial characteristics of the periphery of the medium are also improved, so the intrasurface distribution of the medium disappears. Accordingly, mass productivity and prolonged service life can be attained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18472087A JPS6428372A (en) | 1987-07-24 | 1987-07-24 | Substrate holding mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18472087A JPS6428372A (en) | 1987-07-24 | 1987-07-24 | Substrate holding mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6428372A true JPS6428372A (en) | 1989-01-30 |
Family
ID=16158184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18472087A Pending JPS6428372A (en) | 1987-07-24 | 1987-07-24 | Substrate holding mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6428372A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03191059A (en) * | 1989-12-20 | 1991-08-21 | Matsushita Electric Ind Co Ltd | Sputtering device |
| JP2007290426A (en) * | 2006-04-21 | 2007-11-08 | Toyota Motor Corp | Body front structure |
| JP2008037123A (en) * | 2006-08-01 | 2008-02-21 | Toyota Motor Corp | Body superstructure |
-
1987
- 1987-07-24 JP JP18472087A patent/JPS6428372A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03191059A (en) * | 1989-12-20 | 1991-08-21 | Matsushita Electric Ind Co Ltd | Sputtering device |
| JP2007290426A (en) * | 2006-04-21 | 2007-11-08 | Toyota Motor Corp | Body front structure |
| JP2008037123A (en) * | 2006-08-01 | 2008-02-21 | Toyota Motor Corp | Body superstructure |
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