JPS6428518A - Method of measuring physical quantity - Google Patents

Method of measuring physical quantity

Info

Publication number
JPS6428518A
JPS6428518A JP62184540A JP18454087A JPS6428518A JP S6428518 A JPS6428518 A JP S6428518A JP 62184540 A JP62184540 A JP 62184540A JP 18454087 A JP18454087 A JP 18454087A JP S6428518 A JPS6428518 A JP S6428518A
Authority
JP
Japan
Prior art keywords
image
moire fringes
fringe patterns
test piece
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62184540A
Other languages
Japanese (ja)
Other versions
JP2573493B2 (en
Inventor
Kouji Tsumanuma
Sadao Chigira
Koji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP62184540A priority Critical patent/JP2573493B2/en
Publication of JPS6428518A publication Critical patent/JPS6428518A/en
Application granted granted Critical
Publication of JP2573493B2 publication Critical patent/JP2573493B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To measure physical quantities of an object such as length, distortion, etc. with high accuracy even under the poor circumstances, by forming an image of lattice patterns equally spaced from one another on one end of a multi-core optical fiber and, observing moire fringes formed at the other end of the optical fiber. CONSTITUTION:In the case where the distortion is to be measured under the extremely low temperatures, a test piece 10 having latticed fringe patterns drawn in black-and-white thereon is placed in liquid helium. The image of the fringe patterns 1 is formed by an object lens 2 at one end of an image fiber 3. At this time, if the magnification of the object lens 2 is set in such manner that an interval between the fringe patterns of the formed image is equal to that of core arrays of the optical fiber 3, moire fringes are generated at the other end of the fiber 3. When the test piece 10 is deformed or distorted in the above-described state, the fringe patterns 1 are also deformed and the moire fringes are moved. Accordingly, if the amount of this movement of the moire fringes is arranged to be measured through a television monitor 6 or detected by an image processor 7, the distortion amount of the test piece can be measured with high accuracy even under the poor circumstances.
JP62184540A 1987-07-23 1987-07-23 How to measure physical quantities Expired - Fee Related JP2573493B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62184540A JP2573493B2 (en) 1987-07-23 1987-07-23 How to measure physical quantities

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62184540A JP2573493B2 (en) 1987-07-23 1987-07-23 How to measure physical quantities

Publications (2)

Publication Number Publication Date
JPS6428518A true JPS6428518A (en) 1989-01-31
JP2573493B2 JP2573493B2 (en) 1997-01-22

Family

ID=16154991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62184540A Expired - Fee Related JP2573493B2 (en) 1987-07-23 1987-07-23 How to measure physical quantities

Country Status (1)

Country Link
JP (1) JP2573493B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747362A (en) * 1991-10-18 1998-05-05 U.S. Philips Corporation Method of manufacturing a semiconductor device in which a layer of material is deposited on the surface of a semiconductor wafer from a process gas
JPWO2007142351A1 (en) * 2006-06-09 2009-10-29 株式会社ニコン MOBILE DEVICE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843654U (en) * 1971-09-25 1973-06-06
JPS58102105A (en) * 1981-12-14 1983-06-17 Hitachi Ltd fiber optic sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843654U (en) * 1971-09-25 1973-06-06
JPS58102105A (en) * 1981-12-14 1983-06-17 Hitachi Ltd fiber optic sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5747362A (en) * 1991-10-18 1998-05-05 U.S. Philips Corporation Method of manufacturing a semiconductor device in which a layer of material is deposited on the surface of a semiconductor wafer from a process gas
JPWO2007142351A1 (en) * 2006-06-09 2009-10-29 株式会社ニコン MOBILE DEVICE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Also Published As

Publication number Publication date
JP2573493B2 (en) 1997-01-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees