JPS642916A - Tray supply device - Google Patents

Tray supply device

Info

Publication number
JPS642916A
JPS642916A JP15530587A JP15530587A JPS642916A JP S642916 A JPS642916 A JP S642916A JP 15530587 A JP15530587 A JP 15530587A JP 15530587 A JP15530587 A JP 15530587A JP S642916 A JPS642916 A JP S642916A
Authority
JP
Japan
Prior art keywords
tray
feed claws
pitch
recessed grooves
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15530587A
Other languages
Japanese (ja)
Other versions
JPH012916A (en
Inventor
Toshiyuki Kozuka
Hiroshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP15530587A priority Critical patent/JPS642916A/en
Publication of JPH012916A publication Critical patent/JPH012916A/en
Publication of JPS642916A publication Critical patent/JPS642916A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Reciprocating Conveyors (AREA)

Abstract

PURPOSE: To miniaturize the title device in a semiconductor manufacturing process by arranging so as to prevent the floating up of a tray by pushing both sides of it from above, and move up and down and reciprocate feed claws below the tray and engage/disengage them with recessed grooves at the bottom surface of the tray and transport the tray.
CONSTITUTION: A rack is reciprocated by expanding and contracting the rod of a drive cylinder 20, then, a pinion 17 rotates and feed claws 14 rotate along with a shaft 15. As a result, feed claws 14 are engaged/disengaged with recessed grooves formed at every housing pitch of a product at the lower surface of a tray. At this time, the tray does not float up as it is pressed down by means of a floating up prevention member 27. And, a drive cylinder 26 is operated in a state in which feed claws 14 are made to be engaged with recessed grooves, and the shaft 15 is moved by 1 pitch in a K direction, and the tray is moved by 1 pitch. Next, feed claws 14 are replaced by bringing down feed claws 14. As a result, a device can be miniaturized and occupying space can be diminished.
COPYRIGHT: (C)1989,JPO&Japio
JP15530587A 1987-06-24 1987-06-24 Tray supply device Pending JPS642916A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15530587A JPS642916A (en) 1987-06-24 1987-06-24 Tray supply device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15530587A JPS642916A (en) 1987-06-24 1987-06-24 Tray supply device

Publications (2)

Publication Number Publication Date
JPH012916A JPH012916A (en) 1989-01-06
JPS642916A true JPS642916A (en) 1989-01-06

Family

ID=15602995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15530587A Pending JPS642916A (en) 1987-06-24 1987-06-24 Tray supply device

Country Status (1)

Country Link
JP (1) JPS642916A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016037364A (en) * 2014-08-08 2016-03-22 古河工業株式会社 Alignment apparatus for confectioneries
CN108438905A (en) * 2018-03-29 2018-08-24 安徽三电光伏科技有限公司 Silicon chip conveying mechanism between screen process press and sintering furnace

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57516B2 (en) * 1973-09-19 1982-01-06
JPS5733141A (en) * 1980-08-06 1982-02-23 Fuji Kikai Seizo Kk Tape feeding apparatus
JPS59163897A (en) * 1983-03-09 1984-09-14 株式会社日立製作所 Taped part feeding mechanism

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57516B2 (en) * 1973-09-19 1982-01-06
JPS5733141A (en) * 1980-08-06 1982-02-23 Fuji Kikai Seizo Kk Tape feeding apparatus
JPS59163897A (en) * 1983-03-09 1984-09-14 株式会社日立製作所 Taped part feeding mechanism

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016037364A (en) * 2014-08-08 2016-03-22 古河工業株式会社 Alignment apparatus for confectioneries
CN108438905A (en) * 2018-03-29 2018-08-24 安徽三电光伏科技有限公司 Silicon chip conveying mechanism between screen process press and sintering furnace

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