JPS6429559U - - Google Patents
Info
- Publication number
- JPS6429559U JPS6429559U JP12504387U JP12504387U JPS6429559U JP S6429559 U JPS6429559 U JP S6429559U JP 12504387 U JP12504387 U JP 12504387U JP 12504387 U JP12504387 U JP 12504387U JP S6429559 U JPS6429559 U JP S6429559U
- Authority
- JP
- Japan
- Prior art keywords
- screw
- gear
- housing
- drive source
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Transmission Devices (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Description
第１図はこの考案の差動ネジ機構の一実施例を
示す進退機構の断面図、第２図はプローブチヤツ
ク部分の断面図、第３図はその平面図、第４図は
ウエハプローバの概略斜視図、第５図はプロービ
ングを行なう際のフローチヤートである。
５１……差動ネジ機構、５３……ハウジング、
５５……第１の歯車、５７……第１のネジ、５９
……第２の歯車、６１……第２のネジ、６３……
ナツト部、６５……レバー、６７……クラツチ、
６９……リニアブツシユ、Ｍ……モータ。
Fig. 1 is a cross-sectional view of the advancing/retracting mechanism showing one embodiment of the differential screw mechanism of this invention, Fig. 2 is a cross-sectional view of the probe chuck portion, Fig. 3 is a plan view thereof, and Fig. 4 is a wafer prober. The schematic perspective view and FIG. 5 are flowcharts when performing probing. 51...Differential screw mechanism, 53...Housing,
55...First gear, 57...First screw, 59
...Second gear, 61...Second screw, 63...
Nut part, 65...Lever, 67...Clutch,
69...Linear bush, M...Motor.
Claims (1)
長尺の第１の歯車と、この第１の歯車と同軸に設
けられた第１のネジと、上記第１の歯車にかみ合
つて回転し、第１のネジと平行な第２のネジを突
設した第２の歯車と、第１および第２のネジ間に
差し渡され、各ネジ上を移動可能としたナツト部
と、第２のネジを進退自在に保持して第２のネジ
の先端を突出させたハウジングとを有し、第１な
いし第２の歯車の歯数、あるいは第１および第２
のネジのリードに微小な差を設けたことを特徴と
する差動ネジ機構。 A drive source such as a motor, a long first gear rotated by the drive source, a first screw provided coaxially with the first gear, and a first screw that meshes with the first gear to rotate. a second gear protruding from a second screw parallel to the first screw; a nut portion that is spanned between the first and second screws and is movable on each screw; The housing has a housing in which the screw is movably held and the tip of the second screw is protruded, and the number of teeth of the first to second gears or the first and second
A differential screw mechanism characterized by a minute difference in the lead of the screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12504387U JPS6429559U (en) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12504387U JPS6429559U (en) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6429559U true JPS6429559U (en) | 1989-02-22 |
Family
ID=31375297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12504387U Pending JPS6429559U (en) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6429559U (en) |
-
1987
- 1987-08-17 JP JP12504387U patent/JPS6429559U/ja active Pending
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