JPS6429702A - Shape measuring instrument - Google Patents
Shape measuring instrumentInfo
- Publication number
- JPS6429702A JPS6429702A JP18520687A JP18520687A JPS6429702A JP S6429702 A JPS6429702 A JP S6429702A JP 18520687 A JP18520687 A JP 18520687A JP 18520687 A JP18520687 A JP 18520687A JP S6429702 A JPS6429702 A JP S6429702A
- Authority
- JP
- Japan
- Prior art keywords
- image pickup
- sensor
- image
- inspected
- elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To derive high measuring accuracy by image pickup elements of smaller number of pieces, by executing an image pickup of an enlarged image of a body to be inspected, and measuring its shape thereby. CONSTITUTION:In order to execute an image pickup of a magnified image 3 of a body to be inspected 2, a driving part 5 drives a line-like sensor 9 along this image. In this case, a range where the sensor 9 can execute an image pickup becomes a range where plural image pickup elements 10 of the sensor 9 have been driven by the driving part 5, and virtually, the same measuring accuracy as the case when the elements 10 have been installed on the whole surface within this range where the image pickup can be executed is obtained. In this case, the magnification of a magnifying lens 1, the linear length of the sensor 9 and its driving distance are set so that the magnified image 3 of the body to be inspected 2 is held within the image pickup possible range. In this state, based on an image pickup signal from plural elements 10 of the sensor 9 and a position signal from the driving part 5, etc., a shape of the body to be inspected 2 is measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18520687A JPS6429702A (en) | 1987-07-24 | 1987-07-24 | Shape measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18520687A JPS6429702A (en) | 1987-07-24 | 1987-07-24 | Shape measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6429702A true JPS6429702A (en) | 1989-01-31 |
Family
ID=16166727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18520687A Pending JPS6429702A (en) | 1987-07-24 | 1987-07-24 | Shape measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6429702A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6399159B1 (en) | 1999-07-07 | 2002-06-04 | Eastman Kodak Company | High-efficiency plasma treatment of polyolefins |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5763410A (en) * | 1980-10-03 | 1982-04-16 | Rikagaku Kenkyusho | Measuring method and device for shape of plane pattern |
-
1987
- 1987-07-24 JP JP18520687A patent/JPS6429702A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5763410A (en) * | 1980-10-03 | 1982-04-16 | Rikagaku Kenkyusho | Measuring method and device for shape of plane pattern |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6399159B1 (en) | 1999-07-07 | 2002-06-04 | Eastman Kodak Company | High-efficiency plasma treatment of polyolefins |
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