JPS6429706A - Method for forming vibration type angular velocity detecting device to high vacuum - Google Patents

Abstract

PURPOSE:To set the inside of a container to a high vacuum without deteriorating thermally the characteristic, and to reduce the influence caused by a temperature change, etc., by connecting the container which has contained a vibration type angular velocity detector, and a sub-container which has contained a getter, by a connecting tube, burning the getter in the subcontainer, and thereafter, cutting and sealing the connecting tube. CONSTITUTION:To a case 2 of a vibration type angular velocity detector 10, a sub- container 4 is connected through a connecting tube 2a. In this container 4, a getter 5 is wired, and a terminal 6 for bringing the getter 5 to an electric conduction is drawn out to the outside of the container 4. Also, in the container 4, a suction pipe 4a is formed. First of all, the inside of the container 4 and the case 2 is pressure- reduced by a vacuum pump, etc., from the suction pipe 4a, and the suction pipe 4a is sealed. Subsequently, the case 2 becomes a vacuum state to some extent, the getter 5 is conducted electrically through the terminal 6 and it is burned, and the inside of the container 4 and the case 2 becomes a high vacuum. Thereafter, the connecting tube 2a is cut and sealed, and the case 2 is closed up tightly. In such a way, by burning the getter 5 by using the container 4, deterioration of the detector 10, etc., caused by its heating, etc., are not generated.