JPS6429780A - Optical semiconductor measuring instrument - Google Patents

Optical semiconductor measuring instrument

Info

Publication number
JPS6429780A
JPS6429780A JP18505487A JP18505487A JPS6429780A JP S6429780 A JPS6429780 A JP S6429780A JP 18505487 A JP18505487 A JP 18505487A JP 18505487 A JP18505487 A JP 18505487A JP S6429780 A JPS6429780 A JP S6429780A
Authority
JP
Japan
Prior art keywords
light receiving
stopped
laser light
optical
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18505487A
Other languages
Japanese (ja)
Other versions
JP2546277B2 (en
Inventor
Harukazu Igawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62185054A priority Critical patent/JP2546277B2/en
Publication of JPS6429780A publication Critical patent/JPS6429780A/en
Application granted granted Critical
Publication of JP2546277B2 publication Critical patent/JP2546277B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

PURPOSE:To execute with high accuracy a measurement of the multiplication factor and a measurement of the quantum efficiency by stopping down a laser light and radiating it to only a light receiving part of an optical semiconductor element. CONSTITUTION:A light beam of prescribed wavelength emitted from a laser light source 2 is led by optical fiber cables 3, 5, and a laser light is attenuated through an optical attenuator 4, and thereafter, stopped down to almost the same diameter as the core diameter of the optical fiber cable by a collimating objective lens 6 and a condensing objective lens 7, and radiated to a semiconductor element to be measured 8. The element 8 is moved in three axial directions on orthogonal coordinates by stages 9, 10 and 11 and a pulse motor driver part 15. Subsequently, an optical axis alignment control part 14 measures light receiving power at the time when a photodetector is moved in orthogonal two axis XY directions, calculates the center of a light receiving part in a pellet of the element 8 from a relation of its position and the light receiving power, and also, estimates a stopped-down position of the laser light from the light receiving power at the time when said light receiving power is moved in the Z axis direction. In such a way, the stopped-down laser light is radiated to only the light receiving part, and the light quantity of the stopped-down vicinity is measured by a optical power meter, therefore, the measurement can be executed with high accuracy.
JP62185054A 1987-07-24 1987-07-24 Optical semiconductor measuring device Expired - Lifetime JP2546277B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62185054A JP2546277B2 (en) 1987-07-24 1987-07-24 Optical semiconductor measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62185054A JP2546277B2 (en) 1987-07-24 1987-07-24 Optical semiconductor measuring device

Publications (2)

Publication Number Publication Date
JPS6429780A true JPS6429780A (en) 1989-01-31
JP2546277B2 JP2546277B2 (en) 1996-10-23

Family

ID=16163996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62185054A Expired - Lifetime JP2546277B2 (en) 1987-07-24 1987-07-24 Optical semiconductor measuring device

Country Status (1)

Country Link
JP (1) JP2546277B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03269335A (en) * 1990-03-20 1991-11-29 Mitsubishi Electric Corp Lamp emitting type light source
JP2008032549A (en) * 2006-07-28 2008-02-14 Eko Instruments Trading Co Ltd Optical adjustment apparatus, light source device, and system for measuring characteristic of solar cell
CN114112314A (en) * 2021-12-21 2022-03-01 天津大学 A method for testing the detection performance of a multifunctional photoelectric detection system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396680A (en) * 1977-02-02 1978-08-24 Mitsubishi Electric Corp Photo element measuring instrument
JPS60114976U (en) * 1984-01-13 1985-08-03 日本電気株式会社 Optical semiconductor device inspection equipment
JPS61177469U (en) * 1985-04-24 1986-11-05
JPS6222004A (en) * 1985-07-22 1987-01-30 Toshiba Corp Detecting method for optical axis position

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5396680A (en) * 1977-02-02 1978-08-24 Mitsubishi Electric Corp Photo element measuring instrument
JPS60114976U (en) * 1984-01-13 1985-08-03 日本電気株式会社 Optical semiconductor device inspection equipment
JPS61177469U (en) * 1985-04-24 1986-11-05
JPS6222004A (en) * 1985-07-22 1987-01-30 Toshiba Corp Detecting method for optical axis position

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03269335A (en) * 1990-03-20 1991-11-29 Mitsubishi Electric Corp Lamp emitting type light source
JP2008032549A (en) * 2006-07-28 2008-02-14 Eko Instruments Trading Co Ltd Optical adjustment apparatus, light source device, and system for measuring characteristic of solar cell
CN114112314A (en) * 2021-12-21 2022-03-01 天津大学 A method for testing the detection performance of a multifunctional photoelectric detection system

Also Published As

Publication number Publication date
JP2546277B2 (en) 1996-10-23

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