JPS6429832U - - Google Patents
Info
- Publication number
- JPS6429832U JPS6429832U JP1987125041U JP12504187U JPS6429832U JP S6429832 U JPS6429832 U JP S6429832U JP 1987125041 U JP1987125041 U JP 1987125041U JP 12504187 U JP12504187 U JP 12504187U JP S6429832 U JPS6429832 U JP S6429832U
- Authority
- JP
- Japan
- Prior art keywords
- slide shaft
- probe card
- diameter gear
- small
- backward
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125041U JPS6429832U (it) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987125041U JPS6429832U (it) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6429832U true JPS6429832U (it) | 1989-02-22 |
Family
ID=31375293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987125041U Pending JPS6429832U (it) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6429832U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04355943A (ja) * | 1991-08-13 | 1992-12-09 | Tokyo Electron Ltd | ウエハプローバ |
-
1987
- 1987-08-17 JP JP1987125041U patent/JPS6429832U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04355943A (ja) * | 1991-08-13 | 1992-12-09 | Tokyo Electron Ltd | ウエハプローバ |
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