JPS6429863U - - Google Patents
Info
- Publication number
- JPS6429863U JPS6429863U JP12350787U JP12350787U JPS6429863U JP S6429863 U JPS6429863 U JP S6429863U JP 12350787 U JP12350787 U JP 12350787U JP 12350787 U JP12350787 U JP 12350787U JP S6429863 U JPS6429863 U JP S6429863U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser device
- supply
- forming
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010355 oscillation Effects 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Lasers (AREA)
Description
第１図はこの考案の一実施例を示す系統図、第
２図はこの考案に用いるレーザ発振管の構造の一
例を説明するための斜視図、第３図はこの考案に
用いたレーザ発振管の内部構造を説明するための
断面図、第４図はレーザ発振管の電気的な接続構
造を説明するための接続図、第５図はレーザ発振
管の動作を説明するための波形図、第６図は従来
の技術を説明するための配置図である。
１：ガスボンベ、３：レーザ発振管、２００：
ガス制御器、２０１：ガス吸引系、２０２：ガス
供給系、２０３：真空ポンプ、２０４：定流量コ
ントローラ、２０５：真空計、２０６：遮断弁、
２０７：リークバルブ、２０８：吸引口、２０９
：真空レギユレータ、２１１：遮断弁、２１２：
ガス出口、２１３：ガス入口、３００：レーザ発
振器、３０２：ガス吐出口、３０３：ガス供給口
、３０４：高圧電源部、３０５：トリガ回路、３
０９：反射鏡。
Figure 1 is a system diagram showing one embodiment of this invention, Figure 2 is a perspective view illustrating an example of the structure of a laser oscillation tube used in this invention, and Figure 3 is a laser oscillation tube used in this invention. 4 is a connection diagram to explain the electrical connection structure of the laser oscillation tube. FIG. 5 is a waveform diagram to explain the operation of the laser oscillation tube. FIG. 6 is a layout diagram for explaining the conventional technology. 1: Gas cylinder, 3: Laser oscillation tube, 200:
Gas controller, 201: Gas suction system, 202: Gas supply system, 203: Vacuum pump, 204: Constant flow controller, 205: Vacuum gauge, 206: Shutoff valve,
207: Leak valve, 208: Suction port, 209
: Vacuum regulator, 211: Shutoff valve, 212:
Gas outlet, 213: Gas inlet, 300: Laser oscillator, 302: Gas discharge port, 303: Gas supply port, 304: High voltage power supply section, 305: Trigger circuit, 3
09: Reflector.
Claims (1)
せながら発振動作を行なわせる構成のガスレーザ
装置であつて、 ａ 前記ガスの供給側に真空レギユレータを介在
させたガス供給系を設ける供給手段と、 ｂ 前記ガスの排出側に定流量コントローラを介
在させたガス吸引系を設ける排出手段と、 ｃ 一つの箱体内に少なくとも前記供給手段と前
記排出手段とを組み付けて一体形成する形成手段
と、 を具備することを特徴とするガスレーザ装置。[Claims for Utility Model Registration] A gas laser device configured to perform an oscillation operation while flowing gas at a low pressure inside a laser oscillation tube, comprising: a) a gas supply with a vacuum regulator interposed on the gas supply side; (b) A discharge means having a gas suction system with a constant flow controller interposed on the gas discharge side; (c) At least the supply means and the discharge means are integrally assembled in one box body; 1. A gas laser device comprising: a forming means for forming; and a gas laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12350787U JPH071810Y2 (en) | 1987-08-12 | 1987-08-12 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12350787U JPH071810Y2 (en) | 1987-08-12 | 1987-08-12 | Gas laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6429863U true JPS6429863U (en) | 1989-02-22 |
| JPH071810Y2 JPH071810Y2 (en) | 1995-01-18 |
Family
ID=31372427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12350787U Expired - Lifetime JPH071810Y2 (en) | 1987-08-12 | 1987-08-12 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071810Y2 (en) |
-
1987
- 1987-08-12 JP JP12350787U patent/JPH071810Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH071810Y2 (en) | 1995-01-18 |
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