JPS643035A - Formation of film - Google Patents
Formation of filmInfo
- Publication number
- JPS643035A JPS643035A JP15763087A JP15763087A JPS643035A JP S643035 A JPS643035 A JP S643035A JP 15763087 A JP15763087 A JP 15763087A JP 15763087 A JP15763087 A JP 15763087A JP S643035 A JPS643035 A JP S643035A
- Authority
- JP
- Japan
- Prior art keywords
- film formation
- glass plate
- periphery
- 6aw6d
- capped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015572 biosynthetic process Effects 0.000 title abstract 6
- 239000010408 film Substances 0.000 abstract 6
- 239000011521 glass Substances 0.000 abstract 4
- 241001640034 Heteropterys Species 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Surface Treatment Of Glass (AREA)
Abstract
PURPOSE: To carry out film formation with the periphery of a glass plate capped with a flexible band support to prevent film formation on said periphery with the both surfaces of the periphery covered.
CONSTITUTION: A carrying rack 1 is provided with legs 4 followed by fitting withe frame 5, on which glass plate supports of band shape 6aW6d are set up in a relaxed state. Thence, a glass plate 7 is placed on the central part formed by said supports 6aW6d so that a flexible member 8 with which the periphery is capped come into contact in alignment with adequate superposition. With this condition retained, the rack 1 is transferred into a sputtering apparatus to form a transparent electrically conductive film etc. on the overall upper surface except the masked area of the glass plate 7. Thus, uniform film formation can be accomplished on the whole surface without thickness variation even at the boundary part of the film, and steady thin film formation can be carried out without film formation on the back surface.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62157630A JPH0645480B2 (en) | 1987-06-26 | 1987-06-26 | Membrane formation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62157630A JPH0645480B2 (en) | 1987-06-26 | 1987-06-26 | Membrane formation method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH013035A JPH013035A (en) | 1989-01-06 |
| JPS643035A true JPS643035A (en) | 1989-01-06 |
| JPH0645480B2 JPH0645480B2 (en) | 1994-06-15 |
Family
ID=15653922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62157630A Expired - Lifetime JPH0645480B2 (en) | 1987-06-26 | 1987-06-26 | Membrane formation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645480B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0416736U (en) * | 1990-05-30 | 1992-02-12 | ||
| JPH0589334U (en) * | 1992-05-22 | 1993-12-07 | セントラル硝子株式会社 | Glass board carrier |
| EP0614995A1 (en) * | 1993-03-09 | 1994-09-14 | Leybold Aktiengesellschaft | Mask for shielding the periphery of a disc-shaped substrate surface |
| WO2001058818A3 (en) * | 2000-02-11 | 2002-02-14 | Saint Gobain | Method for transporting glass panels through a coating installation and device for transporting said glass panels |
| JP2003089773A (en) * | 2001-09-18 | 2003-03-28 | Ube Ind Ltd | Joint and method for bonding nylon resin molded products |
| WO2012090887A1 (en) * | 2010-12-27 | 2012-07-05 | 淀川ヒューテック株式会社 | Tray for placing plate in flat manner |
| JP2019519353A (en) * | 2016-04-06 | 2019-07-11 | サン−ゴバン グラス フランス | Device for carrying and holding glass sheets, in particular for carrying and holding glass sheets in cleaning installations, and related methods |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6270246A (en) * | 1985-09-10 | 1987-03-31 | バルツエルス アクチエンゲゼルシヤフト | lens holder |
-
1987
- 1987-06-26 JP JP62157630A patent/JPH0645480B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6270246A (en) * | 1985-09-10 | 1987-03-31 | バルツエルス アクチエンゲゼルシヤフト | lens holder |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0416736U (en) * | 1990-05-30 | 1992-02-12 | ||
| JPH0589334U (en) * | 1992-05-22 | 1993-12-07 | セントラル硝子株式会社 | Glass board carrier |
| EP0614995A1 (en) * | 1993-03-09 | 1994-09-14 | Leybold Aktiengesellschaft | Mask for shielding the periphery of a disc-shaped substrate surface |
| WO2001058818A3 (en) * | 2000-02-11 | 2002-02-14 | Saint Gobain | Method for transporting glass panels through a coating installation and device for transporting said glass panels |
| JP2003528977A (en) * | 2000-02-11 | 2003-09-30 | サン−ゴバン グラス フランス | Method of passing glazing through coating apparatus, and transport apparatus for glazing |
| US7251958B2 (en) | 2000-02-11 | 2007-08-07 | Saint-Gobain Glass France | Method for transporting glazing through a coating-depositing plant |
| KR100756352B1 (en) | 2000-02-11 | 2007-09-10 | 쌩-고벵 글래스 프랑스 | Method of transporting glass panel through coating equipment and apparatus for transporting glass panel |
| JP4955176B2 (en) * | 2000-02-11 | 2012-06-20 | サン−ゴバン グラス フランス | Method of passing glazing through coating device and transport device for glazing |
| JP2003089773A (en) * | 2001-09-18 | 2003-03-28 | Ube Ind Ltd | Joint and method for bonding nylon resin molded products |
| WO2012090887A1 (en) * | 2010-12-27 | 2012-07-05 | 淀川ヒューテック株式会社 | Tray for placing plate in flat manner |
| JP2019519353A (en) * | 2016-04-06 | 2019-07-11 | サン−ゴバン グラス フランス | Device for carrying and holding glass sheets, in particular for carrying and holding glass sheets in cleaning installations, and related methods |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0645480B2 (en) | 1994-06-15 |
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