JPS6430691U - - Google Patents

Info

Publication number
JPS6430691U
JPS6430691U JP12447587U JP12447587U JPS6430691U JP S6430691 U JPS6430691 U JP S6430691U JP 12447587 U JP12447587 U JP 12447587U JP 12447587 U JP12447587 U JP 12447587U JP S6430691 U JPS6430691 U JP S6430691U
Authority
JP
Japan
Prior art keywords
temperature
adsorption layer
heat generating
layer
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12447587U
Other languages
English (en)
Other versions
JPH0436236Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987124475U priority Critical patent/JPH0436236Y2/ja
Publication of JPS6430691U publication Critical patent/JPS6430691U/ja
Application granted granted Critical
Publication of JPH0436236Y2 publication Critical patent/JPH0436236Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の第１実施例を示す静電保持
装置の断面説明図、第２図はこの考案の第２実施
例を示す静電保持装置の断面説明図、第３図は別
の実施例を示す静電保持装置の平面説明図、第４
図は吸着力と温度との関係を示す図である。 図において、２は静電保持装置、４は絶縁基層
、６，８は電極、１０は吸着層、１２は電極電源
部、１４は被吸着物、１６は温度維持機構、１８
は発熱部、２０は温度検出部、２２は発熱部電源
部である。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ 絶縁基層と一組の電極と吸着層とを順次に積
    層して設けた静電保持装置において、前記吸着層
    の温度低下による吸着力減少を防止すべく前記吸
    着層を所定温度に維持する温度維持機構を設けた
    ことを特徴とする温度維持機構を有する静電保持
    装置。 ２ 前記温度維持機構は、前記吸着層を加温すべ
    く前記絶縁基層と前記一組の電極との間に介装し
    た発熱部と、前記吸着層の温度を検出する温度検
    出部と、この温度検出部の検出する吸着層温度に
    より前記吸着層を所定温度に維持すべく前記発熱
    部に電源を供給する発熱部電源部とから成る温度
    維持機構である実用新案登録請求の範囲第１項記
    載の温度維持機構を有する静電保持装置。 ３ 前記温度維持機構は、前記吸着層を加温すべ
    くこの吸着層に内装した発熱部と、前記吸着層の
    温度を検出する温度検出部と、この温度検出部の
    検出する吸着層温度により前記吸着層を所定温度
    に維持すべく前記発熱部に電源を供給する発熱部
    電源部とから成る温度維持機構である実用新案登
    録請求の範囲第１項記載の温度維持機構を有する
    静電保持装置。
JP1987124475U 1987-08-14 1987-08-14 Expired JPH0436236Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987124475U JPH0436236Y2 (ja) 1987-08-14 1987-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987124475U JPH0436236Y2 (ja) 1987-08-14 1987-08-14

Publications (2)

Publication Number Publication Date
JPS6430691U true JPS6430691U (ja) 1989-02-27
JPH0436236Y2 JPH0436236Y2 (ja) 1992-08-26

Family

ID=31374239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987124475U Expired JPH0436236Y2 (ja) 1987-08-14 1987-08-14

Country Status (1)

Country Link
JP (1) JPH0436236Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7472651B2 (en) 2002-12-27 2009-01-06 Mitsubishi Heavy Industries, Ltd. Waste liquid regenerator of printing machine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163118A (en) * 1978-06-15 1979-12-25 Matsushita Electric Industrial Co Ltd Drafting board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54163118A (en) * 1978-06-15 1979-12-25 Matsushita Electric Industrial Co Ltd Drafting board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7472651B2 (en) 2002-12-27 2009-01-06 Mitsubishi Heavy Industries, Ltd. Waste liquid regenerator of printing machine

Also Published As

Publication number Publication date
JPH0436236Y2 (ja) 1992-08-26

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