JPS6430867U - - Google Patents
Info
- Publication number
- JPS6430867U JPS6430867U JP12591787U JP12591787U JPS6430867U JP S6430867 U JPS6430867 U JP S6430867U JP 12591787 U JP12591787 U JP 12591787U JP 12591787 U JP12591787 U JP 12591787U JP S6430867 U JPS6430867 U JP S6430867U
- Authority
- JP
- Japan
- Prior art keywords
- cross
- flow fan
- fan
- laser device
- excimer laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Lasers (AREA)
Description
第１図は本考案の実施例の要部斜視図、第２図
はその平面図と本考案の実施例のガス流速分布を
示す図とを併記した図、第３図は従来の装置の要
部斜視図、第４図はその装置のガス流速分布を示
す図である。
１……クロスフローフアン、１ａ……回転軸、
２，３……ブロワ、４ａ，４ｂ……電極、４ｃ…
…放電領域。
Fig. 1 is a perspective view of the main part of the embodiment of the present invention, Fig. 2 is a plan view thereof and a diagram showing the gas flow velocity distribution of the embodiment of the present invention, and Fig. 3 is the main part of the conventional device. FIG. 4, a partial perspective view, is a diagram showing the gas flow velocity distribution of the device. 1...Cross flow fan, 1a... Rotating shaft,
2, 3...Blower, 4a, 4b...Electrode, 4c...
...discharge area.
Claims (1)
よう配設された一対の電極の放電領域全域に亘つ
て一様にレーザガスを供給するためのクロスフロ
ーフアンを備えてなるエキシマレーザ装置におい
て、上記クロスフローフアンの両端に、当該クロ
スフローフアンより高い送風圧力を有する送風機
を備えたことを特徴とする、エキシマレーザ装置
。 (2) 上記クロスフローフアンと上記送風機とを
一体に構成したことを特徴とする、実用新案登録
請求の範囲第１項記載のエキシマレーザ装置。[Claims for Utility Model Registration] (1) Cross flow for uniformly supplying laser gas over the entire discharge area of a pair of electrodes that have a predetermined length and are arranged to face each other. An excimer laser device comprising a fan, characterized in that the cross-flow fan is provided with blowers having a higher blowing pressure than the cross-flow fan at both ends thereof. (2) The excimer laser device according to claim 1, wherein the cross flow fan and the blower are integrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12591787U JPS6430867U (en) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12591787U JPS6430867U (en) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430867U true JPS6430867U (en) | 1989-02-27 |
Family
ID=31376948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12591787U Pending JPS6430867U (en) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430867U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004526334A (en) * | 2001-05-11 | 2004-08-26 | サイマー， インコーポレイテッド | 4KHz gas discharge laser system |
-
1987
- 1987-08-19 JP JP12591787U patent/JPS6430867U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004526334A (en) * | 2001-05-11 | 2004-08-26 | サイマー， インコーポレイテッド | 4KHz gas discharge laser system |